Temperature control system

ABSTRACT

A temperature control system is used for controlling a temperature of a control target to a target temperature that changes with lapse of time. The system includes: a first adjustment apparatus that includes a first tank that stores a first heat transfer medium, adjusts the temperature of the first heat transfer medium to a first set temperature, and supplies the temperature-adjusted first heat transfer medium; a first circulation circuit through which the first heat transfer medium flows from the first adjustment apparatus to a first flow-through path and returns to the first adjustment apparatus; an adjustment section that adjusts an amount of heat supplied from the first flow-through path to the control target; a memory that stores a relation between the lapse of time and the target temperature; and a controller.

CROSS REFERENCE TO RELATED APPLICATION

The present application is based on Japanese Patent Application No.2019-209955 filed on Nov. 20, 2019, the entire content of which isincorporated herein by reference.

BACKGROUND Technical Field

The present disclosure relates to a temperature control system forcontrolling the temperature of a control target.

Description of the Related Art

Conventionally, there has been known a cooling apparatus which detectsthe temperature of a cooling liquid supplied to an object to be cooled(supply-side detected temperature) and performs feedback control suchthat the supply-side detected temperature becomes equal to a targettemperature (see Japanese Patent No. 5445766). The cooling apparatusdisclosed in Japanese Patent No. 5445766 detects the temperature of thecooling liquid returned from the object to be cooled (return-sidedetected temperature), obtains the degree of change of the return-sidedetected temperature with time, and changes the control condition of thefeedback control to a control condition corresponding to the degree ofchange. By virtue of the above-described configuration, highly accurate,stable temperature control can be secured even when the return-sidedetected temperature changes abruptly because of, for example, a changein the load of the object to be cooled.

Incidentally, the cooling apparatus (temperature control system)disclosed in Japanese Patent No. 5445766 changes the control conditionof the feedback control after an abrupt change in the return-sidedetected temperature. Therefore, in the case where the load of theobject to be cooled fluctuates or the target temperature changes, thedisclosed cooling apparatus encounters a limitation in enabling thesupply-side detected temperature to follow the target temperature.Meanwhile, in order to enhance followability of the supply-side detectedtemperature to the target temperature, the drive state of the coolingapparatus must be maintained at a high level at all times, therebyincreasing the energy consumption of the cooling apparatus.

SUMMARY

One or more embodiments of the present invention provide a temperaturecontrol system which can enhance followability of the temperature of acontrol target to a target temperature while reducing energyconsumption.

One or more embodiments provide a temperature control system forcontrolling the temperature of a control target to a target temperaturewhich changes with lapse of time. The temperature control systemcomprises an adjustment apparatus which includes a tank for storing aheat transfer medium and which adjusts the temperature of the heattransfer medium to a set temperature and supplies thetemperature-adjusted heat transfer medium; a circulation circuit throughwhich the heat transfer medium flows from the adjustment apparatus to aflow-through section (i.e., flow-through path) capable of supplying heatto the control target and returns to the adjustment apparatus; anadjustment section which adjusts the amount of heat supplied from theflow-through section to the control target; a memory section (i.e.,memory) in which the relation between lapse of time and the targettemperature is stored beforehand; and a control section (i.e.,controller). On the basis of the relation stored in the memory section,the control section sets the set temperature, at a point in time whichprecedes, by a predetermined time, a change timing at which the targettemperature changes, such that the set temperature is set to a settemperature corresponding to a post-change target temperature which is avalue of the target temperature after the change timing. The controlsection adjusts the amount of heat by using the adjustment section inorder to control the temperature of the control target to a pre-changetarget temperature until the change timing, the pre-change targettemperature being a value of the target temperature before the changetiming.

According to the above-described configuration, the temperature controlsystem controls the temperature of the control target to the targettemperature which changes with lapse of time.

The adjustment apparatus includes a tank for storing the heat transfermedium. The adjustment apparatus adjusts the temperature of the heattransfer medium to the set temperature and supplies thetemperature-adjusted heat transfer medium. Therefore, the adjustmentapparatus can store in the tank the heat transfer medium whosetemperature has been adjusted to the set temperature or a temperatureclose to the set temperature. Through the circulation circuit, the heattransfer medium flows from the adjustment apparatus to the flow-throughsection capable of supplying heat to the control target and returns tothe adjustment apparatus. Therefore, the temperature of the controltarget can be controlled by causing the heat transfer medium to flowfrom the adjustment apparatus to the flow-through section, and supplyingheat from the flow-through section to the control target. Notably, theexpression “supplying heat to the control target” encompasses the casewhere the control target is cooled as a result of the supply of heatthereto and the case where the control target is heated as a result ofthe supply of heat thereto.

In the case where the target temperature of the control target changeswith lapse of time, the temperature of the control target must bechanged quickly to follow the target temperature. In view of this, onthe basis of the relation between lapse of time and the targettemperature stored in the memory section, the control section sets theset temperature, at a point in time which precedes, by a predeterminedtime, a change timing at which the target temperature changes, such thatthe set temperature is set to a set temperature corresponding to apost-change target temperature which is a value of the targettemperature after the change timing. Therefore, by the change timing,the adjustment apparatus can store in the tank the heat transfer mediumadjusted to the set temperature corresponding to the post-change targettemperature. Accordingly, after the target temperature has changed, theadjustment apparatus can supply from the tank the heat transfer mediumwhose temperature has been adjusted beforehand, thereby enhancing thefollowability of the temperature of the control target to the targettemperature. The only action required is to set the set temperature to aset temperature corresponding to the post-change target temperature atthe point in time which precedes the change timing by the predeterminedtime, and maintaining the drive state of the adjustment apparatus at ahigh level at all times is unnecessary. Therefore, the energyconsumption of the adjustment apparatus can be reduced.

In the case where the set temperature is set to a set temperaturecorresponding to the post-change target temperature at the point in timewhich precedes the change timing by the predetermined time, thetemperature of the heat transfer medium supplied from the adjustmentapparatus to the flow-through section changes from the temperature ofthe heat transfer medium before the set temperature has been changed. Inview of this, in order to control the temperature of the control targetto the pre-change target temperature until the change timing, thecontrol section adjusts the amount of heat supplied from theflow-through section to the control target by using the adjustmentsection. Accordingly, even in the case where the set temperature is setto a set temperature corresponding to the post-change target temperatureat the point in time which precedes the change timing by thepredetermined time, it is possible to prevent deviation of thetemperature of the control target from the target temperature.

In a second means, the temperature control system further comprises atemperature sensor for detecting the temperature of the heat transfermedium supplied from the adjustment apparatus. The control section setsthe predetermined time on the basis of the post-change targettemperature, the temperature of the heat transfer medium detected by thetemperature sensor, a heat capacity from the adjustment apparatus to thecontrol target, and an operating state of the adjustment apparatus.

The amount of heat which the adjustment apparatus must store in the tankbeforehand by the change timing at which the target temperature changescorrelates with the post-change target temperature of the controltarget, the current temperature of the heat transfer medium, and theheat capacity from the adjustment apparatus to the control target. Also,the time which the adjustment apparatus needs to store a required amountof heat in the tank correlates with the operating state of theadjustment apparatus.

In view of the forgoing, in the above-described configuration, thetemperature of the heat transfer medium supplied from the adjustmentapparatus is detected by the temperature sensor. The control sectionsets the predetermined time on the basis of the post-change targettemperature of the control target, the temperature of the heat transfermedium detected by the temperature sensor, the heat capacity from theadjustment apparatus to the control target, and the operating state ofthe adjustment apparatus. Accordingly, the predetermined time can be setappropriately, whereby it becomes possible to reduce the energyconsumption of the adjustment apparatus while enhancing thefollowability of the temperature of the control target to the targettemperature.

In a third means, the control section sets the predetermined time underthe assumption that the adjustment apparatus is operated such that itsoutput becomes the maximum, and operates the adjustment apparatus at themaximum output during a period between the point in time which precedesthe change timing by the predetermined time and the change timing. Byvirtue of such a configuration, the time which the adjustment apparatusrequires to store a required amount of heat in the tank beforehand canbe made the shortest, and the period of time during which ordinarycontrol is performed; i.e., the set temperature of the adjustmentapparatus is set to a set temperature corresponding to the targettemperature, can be made longer. Accordingly, the accuracy incontrolling of the temperature of the control target to the targettemperature can be increased.

In a fourth means, the control section sets the predetermined time underthe assumption that the adjustment apparatus is operated such that itsoperation efficiency becomes the maximum, and operates the adjustmentapparatus such that its operation efficiency becomes the maximum duringa period between the point in time which precedes the change timing bythe predetermined time and the change timing. By virtue of such aconfiguration, when the adjustment apparatus stores a required amount ofheat in the tank beforehand, the adjustment apparatus can be operatedsuch that its operation efficiency becomes the maximum, whereby theenergy consumption of the adjustment apparatus can be reduced.

In a fifth means, the adjustment section includes a first distributionvalve which changes the ratio between the heat transfer medium flowingfrom the adjustment apparatus to the flow-through section and the heattransfer medium flowing out of the adjustment apparatus and returning tothe adjustment apparatus without flowing through the flow-throughsection.

According to the above-described configuration, the first distributionvalve changes the ratio between the heat transfer medium flowing fromthe adjustment apparatus to the flow-through section and the heattransfer medium flowing out of the adjustment apparatus and returning tothe adjustment apparatus without flowing through the flow-throughsection. Therefore, the ratio between the amount of heat supplied fromthe adjustment apparatus to the flow-through section and the amount ofheat returned to the adjustment apparatus can be changed by using thefirst distribution valve. Accordingly, the temperature of the controltarget can be controlled to the target temperature by changing theamount of heat supplied to the flow-through section by using the firstdistribution valve. Moreover, even in the case where the set temperatureis set to a set temperature corresponding to the post-change targettemperature at the point in time which precedes the change timing by thepredetermined time, deviation of the temperature of the control targetfrom the target temperature can be prevented by changing the amount ofheat supplied to the flow-through section by using the firstdistribution valve.

In a sixth means, the adjustment apparatus is a first adjustmentapparatus which includes a first tank for storing a first heat transfermedium and which adjusts the temperature of the first heat transfermedium to a first set temperature and supplies the temperature-adjustedfirst heat transfer medium, and the circulation circuit is a firstcirculation circuit through which the first heat transfer medium flowsfrom the first adjustment apparatus to a first flow-through section(i.e., first flow-through path) capable of supplying heat to the controltarget and returns to the first adjustment apparatus. The temperaturecontrol system further comprises a second adjustment apparatus whichadjusts the temperature of a second heat transfer medium to a second settemperature and supplies the temperature-adjusted second heat transfermedium; and a second circulation circuit through which the second heattransfer medium flows from the second adjustment apparatus to a secondflow-through section (i.e., second flow-through path) capable ofsupplying heat to the control target and returns to the secondadjustment apparatus. The adjustment section adjusts the amounts of heatsupplied from the first flow-through section and the second flow-throughsection to the control target. On the basis of the relation stored inthe memory section, the control section sets the first set temperature,at a point in time which precedes, by a predetermined time, a firstchange timing at which the target temperature changes to a targettemperature to be reached by supplying the first heat transfer mediumfrom the first adjustment apparatus to the first flow-through section,such that the first set temperature is set to a first set temperaturecorresponding to a post-change target temperature which is a value ofthe target temperature after the first change timing. The controlsection adjusts the amount of heat by using the adjustment section inorder to control the temperature of the control target to a pre-changetarget temperature until the first change timing, the pre-change targettemperature being a value of the target temperature before the firstchange timing.

According to the above-described configuration, the temperature controlsystem includes the first adjustment apparatus, the first circulationcircuit, the second adjustment apparatus, and the second circulationcircuit. Therefore, the temperature of the control target can becontrolled by causing the first heat transfer medium and the second heattransfer medium to flow from the first adjustment apparatus and thesecond adjustment apparatus to the first flow-through section and thesecond flow-through section, respectively, and supplying heat from thefirst flow-through section and the second flow-through section to thecontrol target.

On the basis of the relation between lapse of time and the targettemperature stored in the memory section, the control section sets thefirst set temperature, at the point in time which precedes, by thepredetermined time, the first change timing at which the targettemperature changes to a target temperature to be reached by supplyingthe first heat transfer medium from the first adjustment apparatus tothe first flow-through section, such that the first set temperature isset to a first set temperature corresponding to the post-change targettemperature. Therefore, by the first change timing, the first adjustmentapparatus can store in the first tank the first heat transfer mediumadjusted to the first set temperature corresponding to the post-changetarget temperature. Accordingly, after the target temperature haschanged, the first adjustment apparatus can supply from the first tankthe first heat transfer medium whose temperature has been adjustedbeforehand, thereby enhancing the followability of the temperature ofthe control target to the target temperature. The only action requiredis to set the first set temperature to a first set temperaturecorresponding to the post-change target temperature at the point in timewhich precedes the first change timing by the predetermined time, andmaintaining the drive state of the first adjustment apparatus at a highlevel at all times is unnecessary. Therefore, the energy consumption ofthe first adjustment apparatus can be reduced.

In the case where the first set temperature is set to a first settemperature corresponding to the post-change target temperature at thepoint in time which precedes the first change timing by thepredetermined time, the temperature of the first heat transfer mediumsupplied from the first adjustment apparatus to the first flow-throughsection changes from the temperature of the first heat transfer mediumbefore the first set temperature has been changed. In view of this, inorder to control the temperature of the control target to the pre-changetarget temperature until the first change timing, the control sectionadjusts the amount of heat supplied from the first flow-through sectionto the control target by using the adjustment section. In addition, thecontrol section adjusts the amount of heat supplied from the secondflow-through section to the control target by using the adjustmentsection. Accordingly, even in the case where it is difficult to controlthe temperature of the control target to the target temperature bymerely adjusting the amount of heat supplied from the first flow-throughsection to the control target by using the adjustment section, it ispossible to prevent deviation of the temperature of the control targetfrom the target temperature.

In a seventh means, during an assist period starting at the first changetiming, the control section sets the second set temperature to a secondset temperature corresponding to the post-change target temperature, andallows supply of the second heat transfer medium from the secondadjustment apparatus to the second flow-through section. By virtue ofsuch a configuration, when the first heat transfer medium is suppliedfrom the first adjustment apparatus to the first flow-through section soas to control the temperature of the control target to the post-changetarget temperature, the temperature control can be assisted by supplyingthe second heat transfer medium from the second adjustment apparatus tothe second flow-through section. Therefore, the followability of thetemperature of the control target to the target temperature can beenhanced further.

In the case where the control section sets the first set temperature, atthe point in time which precedes, by the predetermined time, the firstchange timing at which the target temperature changes to a targettemperature to be reached by supplying the first heat transfer medium tothe first flow-through section, such that the first set temperature isset to the first set temperature corresponding to the post-change targettemperature, more time (the predetermined time) may be required to storein the first tank the first heat transfer medium whose temperature hasbeen adjusted beforehand, while controlling the temperature of thecontrol target to the target temperature.

In view of the above, in an eighth means, during a period between thepoint in time which precedes the first change timing by thepredetermined time and the first change timing, the control section setsthe second set temperature to a second set temperature corresponding tothe pre-change target temperature, and allows supply of the second heattransfer medium from the second adjustment apparatus to the secondflow-through section. By virtue of such a configuration, in the casewhere the first set temperature is set to a first set temperaturecorresponding to the post-change target temperature and the temperatureof the control target is controlled to the pre-change target temperatureby supplying the first heat transfer medium from the first adjustmentapparatus to the first flow-through section, the temperature control canbe assisted by supplying the second heat transfer medium from the secondadjustment apparatus to the second flow-through section. Therefore, itis possible to prevent the above-described predetermined time frombecoming longer.

In a ninth means, a common heat transfer medium is used in common as thefirst heat transfer medium and the second heat transfer medium, and acommon flow-through section (i.e., common flow-through path) is used incommon as the first flow-through section and the second flow-throughsection. The adjustment section includes a second distribution valvewhich changes the ratio between the common heat transfer medium flowingfrom the common flow-through section to the first adjustment apparatusand the common heat transfer medium flowing from the common flow-throughsection to the second adjustment apparatus.

According to the above-described configuration, the second distributionvalve changes the ratio between the common heat transfer medium flowingfrom the common flow-through section to the first adjustment apparatusand the common heat transfer medium flowing from the common flow-throughsection to the second adjustment apparatus. Namely, the seconddistribution valve changes the ratio between the common heat transfermedium flowing from the first adjustment apparatus to the commonflow-through section and the common heat transfer medium flowing fromthe second adjustment apparatus to the common flow-through section.Therefore, the ratio between the amount of heat supplied from the firstadjustment apparatus to the common flow-through section and the amountof heat supplied from the second adjustment apparatus to the commonflow-through section can be changed by the second distribution valve.Accordingly, the temperature of the control target can be controlled tothe target temperature by changing the amount of heat supplied to thecommon flow-through section by using the second distribution valve.Moreover, even in the case where the first set temperature is set to afirst set temperature corresponding to the post-change targettemperature at the point in time which precedes the first change timingby the predetermined time, deviation of the temperature of the controltarget from the target temperature can be prevented by changing theamount of heat supplied to the common flow-through section by using thesecond distribution valve.

In a tenth means, a common heat transfer medium is used in common as thefirst heat transfer medium and the second heat transfer medium, and acommon flow-through section is used in common as the first flow-throughsection and the second flow-through section. The adjustment sectionincludes a third distribution valve which changes the ratio among thecommon heat transfer medium flowing from the common flow-through sectionto the first adjustment apparatus, the common heat transfer mediumflowing out of the common flow-through section and returning to thecommon flow-through section without flowing through the first adjustmentapparatus and the second adjustment apparatus, and the common heattransfer medium flowing from the common flow-through section to thesecond adjustment apparatus.

According to the above-described configuration, the temperature controlsystem includes the third distribution valve which changes the ratioamong the common heat transfer medium flowing from the commonflow-through section to the first adjustment apparatus, the common heattransfer medium flowing out of the common flow-through section andreturning to the common flow-through section without flowing through thefirst adjustment apparatus and the second adjustment apparatus, and thecommon heat transfer medium flowing from the common flow-through sectionto the second adjustment apparatus. Namely, the third distribution valvechanges the ratio among the common heat transfer medium flowing from thefirst adjustment apparatus to the common flow-through section, thecommon heat transfer medium flowing out of the common flow-throughsection and returning to the common flow-through section without flowingthrough the first adjustment apparatus and the second adjustmentapparatus, and the common heat transfer medium flowing from the secondadjustment apparatus to the common flow-through section. Therefore, theratio among the amount of heat that the common flow-through sectionreceives from the first adjustment apparatus, the amount of heatreturned to the common flow-through section, and the amount of heat thatthe common flow-through section receives from the second adjustmentapparatus can be changed by the third distribution valve. Accordingly,the temperature of the control target can be controlled to the targettemperature by changing the amount of heat supplied to the commonflow-through section by using the third distribution valve. Moreover,even in the case where the first set temperature is set to a first settemperature corresponding to the post-change target temperature at thepoint in time which precedes the first change timing by thepredetermined time, deviation of the temperature of the control targetfrom the target temperature can be prevented by changing the amount ofheat supplied to the common flow-through section by using the thirddistribution valve. In addition, it is possible to realize a state inwhich the common heat transfer medium flowing out of the commonflow-through section is returned as it is to the common flow-throughsection without allowing the common heat transfer medium to flow fromthe common flow-through section to the first adjustment apparatus andthe second adjustment apparatus.

In an eleventh means, the second circulation circuit is independent ofthe first circulation circuit, and the temperature control systemfurther comprises a third circulation circuit which is independent ofthe first circulation circuit and the second circulation circuit andthrough which a third heat transfer medium whose usable temperaturerange is wider than usable temperature ranges of the first heat transfermedium and the second heat transfer medium circulates.

The third circulation circuit includes a third flow-through section(i.e., third flow-through path) through which the third heat transfermedium flows and which exchanges heat with the first flow-throughsection, and a fourth flow-through (i.e., fourth flow-through path)section through which the third heat transfer medium flows and whichexchanges heat with the second flow-through section. The thirdcirculation circuit includes no tank for storing the third heat transfermedium.

The third heat transfer medium flows from the third flow-through sectionand the fourth flow-through section to a heat exchange section whichexchanges heat with the control target, and returns to the thirdflow-through section and the fourth flow-through section.

The adjustment section includes a fourth distribution valve whichchanges the ratio between the third heat transfer medium flowing fromthe heat exchange section to the third flow-through section and thethird heat transfer medium flowing from the heat exchange section to thefourth flow-through section.

According to the above-described configuration, the third circulationcircuit is independent of the first circulation circuit and the secondcirculation circuit, and the third heat transfer medium whose usabletemperature range is wider than that of the first heat transfer mediumcirculates through the third circulation circuit. Therefore, the thirdheat transfer medium, which may be expensive, is caused to circulateonly through the third circulation circuit, whereby the amount of thethird heat transfer medium to be used can be reduced. Additionally, thethird circulation circuit does not include a tank for storing the thirdheat transfer medium. Therefore, the amount of the third heat transfermedium circulating through the third circulation circuit can be reducedfurther.

The third circulation circuit includes the third flow-through sectionthrough which the third heat transfer medium flows and which exchangesheat with the first flow-through section, and the fourth flow-throughsection through which the third heat transfer medium flows and whichexchanges heat with the second flow-through section. Therefore, thethermal energy supplied to the first flow-through section can besupplied to the third flow-through section through heat exchange betweenthe first flow-through section and the third flow-through section.Similarly, the thermal energy supplied to the second flow-throughsection can be supplied to the fourth flow-through section through heatexchange between the second flow-through section and the fourthflow-through section. The third circulation circuit causes the thirdheat transfer medium to flow from the third flow-through section and thefourth flow-through section to the heat exchange section, whichexchanges heat with the control target, and return to the thirdflow-through section and the fourth flow-through section. Therefore, viathe third heat transfer medium, thermal energy can be supplied from thethird flow-through section and the fourth flow-through section to theheat exchange section, which exchanges heat with the control target.

The fourth distribution valve changes the ratio between the third heattransfer medium flowing from the heat exchange section to the thirdflow-through section and the third heat transfer medium flowing from theheat exchange section to the fourth flow-through section. Therefore, theratio between the amount of heat supplied from the third flow-throughsection to the heat exchange section and the amount of heat suppliedfrom the fourth flow-through section to the heat exchange section can bechanged by the fourth distribution valve. Accordingly, the temperatureof the control target can be controlled to the target temperature bychanging the amount of heat supplied to the heat exchange section byusing the fourth distribution valve. As described above, the amount ofthe third heat transfer medium circulating through the third circulationcircuit can be reduced. Accordingly, the temperature of the third heattransfer medium can be changed quickly, whereby responsiveness incontrolling the temperature of the control target can be enhanced.Moreover, even in the case where the first set temperature is set to afirst set temperature corresponding to the post-change targettemperature at the point in time which precedes the first change timingby the predetermined time, deviation of the temperature of the controltarget from the target temperature can be prevented by changing theamount of heat supplied to the heat exchange section by using the fourthdistribution valve.

In a twelfth means, the second circulation circuit is independent of thefirst circulation circuit, and the temperature control system furthercomprises a third circulation circuit which is independent of the firstcirculation circuit and the second circulation circuit and through whicha third heat transfer medium whose usable temperature range is widerthan usable temperature ranges of the first heat transfer medium and thesecond heat transfer medium circulates.

The third circulation circuit includes a third flow-through sectionthrough which the third heat transfer medium flows and which exchangesheat with the first flow-through section, and a fourth flow-throughsection through which the third heat transfer medium flows and whichexchanges heat with the second flow-through section. The thirdcirculation circuit includes no tank for storing the third heat transfermedium.

The third heat transfer medium flows from the third flow-through sectionand the fourth flow-through section to a heat exchange section whichexchanges heat with the control target, and returns to the thirdflow-through section and the fourth flow-through section.

The adjustment section includes a fifth distribution valve which changesthe ratio among the third heat transfer medium flowing from the heatexchange section to the third flow-through section, the third heattransfer medium flowing out of the heat exchange section and returningto the heat exchange section without flowing through the thirdflow-through section and the fourth flow-through section, and the thirdheat transfer medium flowing from the heat exchange section to thefourth flow-through section.

According to the above-described configuration, the fifth distributionvalve changes the ratio among the third heat transfer medium flowingfrom the heat exchange section to the third flow-through section, thethird heat transfer medium flowing out of the heat exchange section andreturning to the heat exchange section without flowing through the thirdflow-through section and the fourth flow-through section, and the thirdheat transfer medium flowing from the heat exchange section to thefourth flow-through section. Therefore, the ratio among the amount ofheat that the heat exchange section receives from the third flow-throughsection, the amount of heat returned to the heat exchange section, andthe amount of heat that the heat exchange section receives from thefourth flow-through section can be changed by the fifth distributionvalve. Accordingly, the temperature of the control target can becontrolled to the target temperature by changing the amount of heatsupplied to the heat exchange section by using the fifth distributionvalve. Moreover, even in the case where the first set temperature is setto a first set temperature corresponding to the post-change targettemperature at the point in time which precedes the first change timingby the predetermined time, deviation of the temperature of the controltarget from the target temperature can be prevented by changing theamount of heat supplied to the heat exchange section by using the fifthdistribution valve. In addition, it is possible to realize a state inwhich the third heat transfer medium flowing out of the heat exchangesection is returned as it is to the heat exchange section withoutallowing the third heat transfer medium to flow from the heat exchangesection to the third flow-through section and the fourth flow-throughsection.

A thirteen means is a temperature control system for controlling thetemperature of a control target to a target temperature which changeswith lapse of time. The temperature control system comprises a firstadjustment apparatus which includes a first tank for storing a firstheat transfer medium and which adjusts the temperature of the first heattransfer medium to a first set temperature and supplies thetemperature-adjusted first heat transfer medium; a first circulationcircuit through which the first heat transfer medium flows from thefirst adjustment apparatus to a first flow-through section and returnsto the first adjustment apparatus; a heater which heats the controltarget and can control its heat generation amount; a third circulationcircuit which is independent of the first circulation circuit, throughwhich a third heat transfer medium whose usable temperature range iswider than a usable temperature range of the first heat transfer mediumcirculates, and which includes a third flow-through section whichexchanges heat with the first flow-through section and does not includea tank for storing the third heat transfer medium; an adjustment sectionwhich adjusts the amount of heat exchanged between the firstflow-through section and the third flow-through section and the heatgeneration amount of the heater; a memory section in which the relationbetween lapse of time and the target temperature is stored beforehand;and a control section.

On the basis of the relation stored in the memory section, the controlsection sets the first set temperature, at a point in time whichprecedes, by a predetermined time, a first change timing at which thetarget temperature changes to a target temperature to be reached bysupplying the first heat transfer medium from the first adjustmentapparatus to the first flow-through section, such that the first settemperature is set to a first set temperature corresponding to apost-change target temperature which is a value of the targettemperature after the first change timing. The control section adjuststhe amount of heat and the heat generation amount by using theadjustment section in order to control the temperature of the controltarget to a pre-change target temperature until the first change timing,the pre-change target temperature being a value of the targettemperature before the first change timing.

According to the above-described configuration, the third circulationcircuit is independent of the first circulation circuit, and the thirdheat transfer medium whose usable temperature range is wider than thatof the first heat transfer medium circulates through the thirdcirculation circuit. Therefore, the third heat transfer medium, whichmay be expensive, is caused to circulate only through the thirdcirculation circuit, whereby the amount of the third heat transfermedium to be used can be reduced. Additionally, the third circulationcircuit does not include a tank for storing the third heat transfermedium. Therefore, the amount of the third heat transfer mediumcirculating through the third circulation circuit can be reducedfurther.

The first circulation circuit achieves an action and an effect similarto those of the circulation circuit of the first means. Since the firstheat transfer medium whose usable temperature range is narrower than theusable temperature range of the third heat transfer medium is used, aninexpensive heat transfer medium can be used as the first heat transfermedium. The heater can heat the control target and can control its heatgeneration amount. Therefore, the control target can be heated directlywithout use of a heat transfer medium.

The temperature control system includes the adjustment section whichadjusts the amount of heat exchanged between the first flow-throughsection and the third flow-through section and the heat generationamount of the heater. Therefore, the amount of heat supplied to thethird flow-through section and the amount of heat supplied directly tothe control target can be adjusted by using the adjustment section,whereby the temperature of the control target can be controlled to thetarget temperature. As described above, the amount of the third heattransfer medium circulating through the third circulation circuit can bereduced. Accordingly, the temperature of the third heat transfer mediumcan be changed quickly, whereby responsiveness in controlling thetemperature of the control target can be enhanced. Moreover, even in thecase where the set temperature is set to a set temperature correspondingto the post-change target temperature at the point in time whichprecedes the change timing by the predetermined time, deviation of thetemperature of the control target from the target temperature can beprevented by changing the amount of heat supplied to the heat exchangesection by using the adjustment section. In addition, the controlsection adjusts the amount of heat supplied from the heater directly tothe control target by using the adjustment section. Therefore, even inthe case where it is difficult to control the temperature of the controltarget to the target temperature by merely adjusting the amount of heatsupplied from the first flow-through section to the control target byusing the adjustment section, it is possible to prevent deviation of thetemperature of the control target from the target temperature.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of the present inventionwill be apparent from the following description made with reference tothe accompanying drawings.

FIG. 1 is a schematic diagram of a temperature control system accordingto a first embodiment;

FIG. 2 is a time chart showing changes in the target temperature of alower electrode and the set temperature of a first chiller;

FIG. 3 is a schematic diagram of a temperature control system accordingto a second embodiment;

FIG. 4 is a schematic diagram of a temperature control system accordingto a third embodiment;

FIG. 5 is a schematic diagram of a temperature control system accordingto a fourth embodiment;

FIG. 6 is a time chart showing changes in the target temperature of thelower electrode, the set temperature of the first chiller, and the settemperature of a second chiller;

FIG. 7 is a schematic diagram of a temperature control system accordingto a fifth embodiment;

FIG. 8 is a schematic diagram of a temperature control system accordingto a sixth embodiment;

FIG. 9 is a schematic diagram of a temperature control system accordingto a seventh embodiment;

FIG. 10 is a schematic diagram of a temperature control system accordingto an eighth embodiment, and

FIG. 11 is a time chart showing changes in the target temperature of thelower electrode, the output of the first chiller, and the output of thesecond chiller.

DETAILED DESCRIPTION First Embodiment

A first embodiment will now be described with reference to the drawings.The first embodiment is embodied as a temperature control system forcontrolling the temperature of a lower electrode (control target) of asemiconductor manufacturing apparatus.

As shown in FIG. 1, a temperature control system 100 includes a firstcirculation circuit 110, a control section 80, etc.

The first circulation circuit 110 is a circuit through which a firstheat transfer medium circulates. The first heat transfer medium (heattransfer medium) is, for example, a liquid composed of ethylene glycol(60%) and water (40%). The first heat transfer medium is relativelyinexpensive. The first circulation circuit 110 includes a first chiller11, a temperature sensor 19, a first distribution valve 12, etc.

The first chiller 11 (adjustment apparatus) includes a tank 11 a, a pump11 b, etc. The first chiller 11 can adjust the temperature of the firstheat transfer medium to −25° C. to 95° C. The tank 11 a (first tank)stores the first heat transfer medium adjusted to a set temperature Tc.The pump 11 b discharges to a flow passage 17 a the first heat transfermedium stored in the tank 11 a. The flow passage 17 a is connected tothe common port (COM) of the first distribution valve 12.

The temperature sensor 19 detects the temperature of the first heattransfer medium supplied from the first chiller 11 and outputs thedetection result (detected temperature) to the control section 80.

The first distribution valve 12 (adjustment section) is a three-wayvalve having the common port, an A port, and a B port. A flow passage 17b is connected to the A port. A flow passage 17 d is connected to the Bport. The first distribution valve 12 continuously changes the ratiobetween the flow rate of the first heat transfer medium flowing from theflow passage 17 a to the flow passage 17 b and the flow rate of thefirst heat transfer medium flowing from the flow passage 17 a to theflow passage 17 d. The first distribution valve 12 continuously changesthe state of flow between a state in which all (100%) of the first heattransfer medium flows from the flow passage 17 a to the flow passage 17b and a state in which all (100%) of the first heat transfer mediumflows from the flow passage 17 a to the flow passage 17 d. In the firstdistribution valve 12, the pressure loss of the first heat transfermedium is constant irrespective of the ratio at which the first heattransfer medium supplied from the first chiller 11 is distributedbetween the flow passage 17 b and the flow passage 17 d.

A semiconductor manufacturing apparatus 90 includes an upper electrode91 and a lower electrode 92, and generates plasma P between the upperelectrode 91 and the lower electrode 92. A workpiece W such as a waferis placed on the lower electrode 92. A temperature sensor 94 detects thetemperature of the lower electrode 92. The lower electrode 92 isintegrated with a heat exchanger 93. Heat exchange is performed betweenthe heat exchanger 93 and the lower electrode 92.

The heat exchanger 93 (flow-through section) is connected to the flowpassage 17 b, and the first heat transfer medium flows through the heatexchanger 93. A flow passage 18 is connected to the heat exchanger 93.The flow passage 18 connects the heat exchanger 93 and the tank 11 a ofthe first chiller 11. The above-described flow passage 17 d connects theB port of the first distribution valve 12 and the flow passage 18.Namely, the first distribution valve 12 changes the ratio between thefirst heat transfer medium flowing from the first chiller 11 to the heatexchanger 93 and the first heat transfer medium flowing out of the firstchiller 11 and returning to the first chiller 11 without flowing throughthe heat exchanger 93. In the heat exchanger 93, heat exchange isperformed between the first heat transfer medium and the lower electrode92. Notably, the flow passages 17 a, 17 b, 17 d, and 18 form acirculation circuit.

The control section 80 is a microcomputer including a CPU, a ROM, a RAM,a memory device 80 a, an input/output interface, etc. The controlsection 80 receives the results of detections performed by thetemperature sensors 19 and 94, etc. The control section 80 controls thetemperature of the lower electrode 92 to a target temperature Te. Thetarget temperature Te is changed to, for example, 90° C., 0° C., or −20°C. in accordance with a process (lapse of time) in the semiconductormanufacturing apparatus 90. Since heat flows from the plasma P into thelower electrode 92, the temperature of the lower electrode 92 may riseto about 110° C. upon generation of the plasma P. As a result of thetemperature rise, the temperature of the first heat transfer mediumflowing out of the heat exchanger 93 may also rise to a temperatureclose to 110° C.

The control section 80 controls the set temperature Tc of the firstchiller 11 and the distribution ratio of the first distribution valve 12on the basis of the target temperature Te of the lower electrode 92 andthe results of detections performed by the temperature sensors 19 and 94(i.e., the temperatures detected by the temperature sensors 19 and 94).Thus, the flow rate of the first heat transfer medium flowing throughthe heat exchanger 93 is adjusted; as a result, the amount of heatsupplied to the heat exchanger 93 is adjusted. Namely, the firstdistribution valve 12 adjusts the amount of heat supplied from the heatexchanger 93 to the lower electrode 92. The control section 80 sets theset temperature Tc of the first chiller 11 to a set temperature Tccorresponding to the target temperature Te and feedback-controls thedistribution ratio of the first distribution valve 12 such that thetemperature of the lower electrode 92 becomes equal to the targettemperature Te.

FIG. 2 is a time chart showing changes in the target temperature Te ofthe lower electrode 92 and the set temperature Tc of the first chiller11. As shown in FIG. 2, the target temperature Te of the lower electrode92 periodically changes to 90° C., to 0° C., and to −20° C. with theprogress of the process in the semiconductor manufacturing apparatus 90(with lapse of time). The relation between lapse of time and the targettemperature Te is stored in the memory device 80 a (memory section) ofthe control section 80 beforehand. For example, the memory device 80 astores the target temperature Te which changes with time such that thetarget temperature Te is 90° C. until time t2, changes to 0° C. at timet2, is 0° C. until time t4, changes to −20° C. at time t4, is −20° C.until time t5, and changes to 90° C. at time t5.

In response to each change in the target temperature Te, the controlsection 80 sets the set temperature Tc of the first chiller 11 to a settemperature Tc corresponding to the target temperature Te. For example,when the target temperature Te is 90° C., the control section 80 setsthe set temperature Tc to 50° C.; when the target temperature Te is 0°C., the control section 80 sets the set temperature Tc to −5° C.; andwhen the target temperature Te is −20° C., the control section 80 setsthe set temperature Tc to −25° C. The control section 80feedback-controls the output of the first chiller 11 such that thetemperature T1 of the first heat transfer medium detected by thetemperature sensor 19 becomes equal to the set temperature Tc. Also, thecontrol section 80 feedback-controls the distribution ratio of the firstdistribution valve 12 such that the temperature T3 of the lowerelectrode 92 detected by the temperature sensor 94 becomes equal to thetarget temperature Te.

Further, the control section 80 sets the set temperature Tc on the basisof the above-described relation stored in the memory device 80 a.Specifically, at a point in time which precedes, by a predetermined timeΔt, a change timing at which the target temperature Te changes from atarget temperature Te1 to a target temperature Te2, the control section80 sets the set temperature Tc to a set temperature Tc2 corresponding toa post-change target temperature Te2 which is a value of the targettemperature Te after the change timing. Subsequently, the controlsection 80 controls the first distribution valve 12 so as to adjust theratio of distribution of the first heat transfer medium between the flowpassage 17 b and the flow passage 17 d such that the temperature of thelower electrode 92 is controlled to a pre-change target temperature Te1until the change timing. The pre-change target temperature Te1 is avalue of the target temperature Te before the change timing. As aresult, the first heat transfer medium adjusted to the set temperatureTc2 corresponding to the post-change target temperature Te2 is stored inthe tank 11 a by the change timing.

For example, at time t1 which precedes time t2 by the predetermined timeΔt1, the control section 80 sets the set temperature Tc such that theset temperature Tc gradually changes to a set temperature Tc (=−5° C.)corresponding to the post-change target temperature Te2 (=0° C.). Also,in order to control the temperature of the lower electrode 92 to thepre-change target temperature Te1 (=90° C.) until time t2, the controlsection 80 controls the first distribution valve 12 to decrease theratio of distribution of the first heat transfer medium to the flowpassage 17 b and increase the ratio of distribution of the first heattransfer medium to the flow passage 17 d. Namely, the control section 80reduces the amount of the first heat transfer medium flowing to the flowpassage 17 b in order to prevent the temperature of the lower electrode92 from dropping from the target temperature Te1 (=90° C.) even when thefirst heat transfer medium whose temperature is lower than the settemperature Tc1 (=50° C.) corresponding to the target temperature Te1(=90° C.) is supplied from the first chiller 11. Notably, instead ofgradually changing the set temperature Tc at time t1, the settemperature Tc may be instantaneously set to the set temperature Tc2(=−5° C.) corresponding to the post-change target temperature Te2 (=0°C.) Similarly, at time t3 which precedes time t4 by a predetermined timeΔt2, the control section 80 sets the set temperature Tc such that theset temperature Tc gradually changes to a set temperature Tc3 (=−25° C.)corresponding to a post-change target temperature Te3 (=−20° C.) (or thecontrol section 80 instantaneously sets the set temperature Tc to theset temperature Tc3 (=−25° C.)). Also, in order to control thetemperature of the lower electrode 92 to the pre-change targettemperature Te2 (=0° C.) until time t4, the control section 80 controlsthe first distribution valve 12 to decrease the ratio of distribution ofthe first heat transfer medium to the flow passage 17 b and increase theratio of distribution of the first heat transfer medium to the flowpassage 17 d.

The amount of heat which the first chiller 11 must store in the tank 11a beforehand by the change timing at which the target temperature Techanges correlates with the post-change target temperature Te2 of thelower electrode 92, the current temperature of the first heat transfermedium, and the heat capacity C from the first chiller 11 to the lowerelectrode 92. The set temperature Tc of the first chiller 11 forcontrolling the temperature of the lower electrode 92 to the targettemperature Te2 is the set temperature Tc2 corresponding to the targettemperature Te2. Also, the time which the first chiller 11 needs tostore a required amount of heat in the tank 11 a correlates with theoutput (operating state) of the first chiller 11.

In view of the forgoing, the control section 80 sets the above-describedpredetermined time Δt on the basis of the set temperature Tc2corresponding to the post-change target temperature Te2, the temperatureT1 of the first heat transfer medium detected by the temperature sensor19, the heat capacity C from the first chiller 11 to the lower electrode92, and the output q of the first chiller 11. The heat capacity Cincludes the heat capacities of members whose temperatures change whenthe temperature of the lower electrode 92 is controlled. Examples of themembers include the lower electrode 92, the circulating first heattransfer medium, the heat exchanger 93, the flow passages 17 a, 17 b,and 18, the first distribution valve 12, and the tank 11 a. During thepredetermined time Δt, the first chiller 11 is operated such that theoutput q of the first chiller 11 becomes the maximum output qm (q=qm).Specifically, the control section 80 sets the predetermined time Δt inaccordance with an equation of Δt=C×(T−Tc2)/q. Notably, in the casewhere the first chiller 11 has already operated to produce an output ql,the difference (qm−ql) between the maximum output qm and the output qlmay be used as the output q.

The present embodiment having been described in detail above has thefollowing advantages.

When the target temperature Te of the lower electrode 92 changes withtime, the temperature of the lower electrode 92 must be changed quicklyto follow the target temperature Te. In view of this, at a point in timewhich precedes, by the predetermined time Δt, the change timing at whichthe target temperature Te changes, the control section 80 sets the settemperature Tc to a set temperature Tc corresponding to the post-changetarget temperature Te on the basis of the relation between lapse of timeand the target temperature Te, which relation is stored in the memorydevice 80 a. Therefore, by the change timing, the first chiller 11 canstore in the tank 11 a the first heat transfer medium adjusted to theset temperature Tc corresponding to the post-change target temperatureTe. Accordingly, after the target temperature Te has changed, the firstchiller 11 can supply from the tank 11 a the first heat transfer mediumwhose temperature has been adjusted beforehand, whereby thefollowability of the temperature of the lower electrode 92 to the targettemperature Te can be enhanced. The only action required is to set theset temperature Tc to a set temperature Tc corresponding to thepost-change target temperature Te, at the point in time which precedesthe change timing by the predetermined time Δt, and maintaining thedrive state of the first chiller 11 at a high level at all times isunnecessary. Therefore, the energy consumption of the first chiller 11can be reduced.

In the case where the set temperature Tc is set to a set temperature Tccorresponding to the post-change target temperature Te at the point intime which precedes the change timing by the predetermined time Δt, thetemperature of the first heat transfer medium supplied from the firstchiller 11 to the heat exchanger 93 changes from the temperature of thefirst heat transfer medium before the set temperature Tc has beenchanged. In view of this, in order to control the temperature of thelower electrode 92 to the pre-change target temperature Te until thechange timing, the control section 80 adjusts the amount of heatsupplied from the first chiller 11 to the heat exchanger 93, and thusadjusts the amount of heat supplied from the heat exchanger 93 to thelower electrode 92, by using the first distribution valve 12.Accordingly, even in the case where the set temperature Tc is set to aset temperature Tc corresponding to the post-change target temperatureTe at the point in time which precedes the change timing by thepredetermined time Δt, it is possible to prevent deviation of thetemperature of the lower electrode 92 from the target temperature Te.

The control section 80 sets the predetermined time Δt on the basis ofthe post-change target temperature Te of the lower electrode 92 (the settemperature Tc corresponding to the target temperature Te), thetemperature T1 of the first heat transfer medium detected by thetemperature sensor 19, the heat capacity C from the first chiller 11 tothe lower electrode 92, and the operating state (output q) of the firstchiller 11. Accordingly, the predetermined time Δt can be setappropriately. Thus, it is possible to reduce the energy consumption ofthe first chiller 11 while enhancing the followability of thetemperature of the lower electrode 92 to the target temperature Te.

The control section 80 sets the predetermined time Δt on the assumptionthat the first chiller 11 is operated to produce a maximum output (qm),and the first chiller 11 is operated to produce the maximum output untilthe change timing since the point in time which precedes the changetiming by the predetermined time Δt. By virtue of such a configuration,the predetermined time Δt which the first chiller 11 requires to store arequired amount of heat in the tank 11 a beforehand can be made theshortest, and the period of time during which ordinary control isperformed; i.e., the set temperature Tc of the first chiller 11 is setto a set temperature Tc corresponding to the current target temperatureTe, can be made longer. Accordingly, the accuracy in controlling thetemperature of the lower electrode 92 to the target temperature Te canbe increased.

The first distribution valve 12 changes the ratio between the first heattransfer medium flowing from the first chiller 11 to the heat exchanger93 and the first heat transfer medium flowing out of the first chiller11 and returning to the first chiller 11 without flowing through theheat exchanger 93. Therefore, the ratio between the amount of heatsupplied from the first chiller 11 to the heat exchanger 93 and theamount of heat returned to the first chiller 11 can be changed by thefirst distribution valve 12. Accordingly, the temperature of the lowerelectrode 92 can be controlled to the target temperature Te by changingthe amount of heat supplied to the heat exchanger 93 by using the firstdistribution valve 12. Moreover, even in the case where the settemperature Tc is set to a set temperature Tc corresponding to thepost-change target temperature Te at the point in time which precedesthe change timing by the predetermined time Δt, deviation of thetemperature of the lower electrode 92 from the target temperature Te canbe prevented by changing the amount of heat supplied to the heatexchanger 93 by using the first distribution valve 12.

Notably, the predetermined time Δt may be set as follows. It is assumedthat, during the predetermined time Δt, the first chiller 11 is operatedto produce a maximum efficiency output qe at which its operationefficiency becomes the maximum. In such a case, the predetermined timeΔt is set in accordance with the equation of Δt=C×(T1−Tc2)/q where q=qe.Namely, the control section 80 may set the predetermined time Δt underthe assumption that the first chiller 11 is operated such that itsoperation efficiency becomes the maximum, and operate the first chiller11 such that its operation efficiency becomes the maximum, until thechange timing since the point in time which precedes the change timingby the predetermined time Δt. By virtue of such a configuration, whenthe first chiller 11 stores a required amount of heat in the tank 11 abeforehand, the first chiller 11 can be operated such that its operationefficiency becomes the maximum, whereby the energy consumption of thefirst chiller 11 can be reduced. Notably, in the case where the firstchiller 11 has already operated to produce an output ql, the difference(qe−ql) between the maximum efficiency output qe and the output ql maybe used as the output q.

Second Embodiment

A second embodiment will now be described. In the following description,the difference between the second embodiment and the first embodimentwill be mainly described. Notably, portions identical with those of thefirst embodiment are denoted by the same reference numerals, and theirdescription will not be repeated.

As shown in FIG. 3, a temperature control system 200 includes a firstcirculation circuit 110, a second circulation circuit 120, the controlsection 80, etc. The first circulation circuit 110 is a circuit throughwhich the above-described first heat transfer medium circulates. Thesecond circulation circuit 120 is a circuit through which a second heattransfer medium circulates. The second heat transfer medium is the sameliquid as the first heat transfer medium. Namely, the first circulationcircuit 110 and the second circulation circuit 120 are circuits throughwhich the above-described first heat transfer medium (common heattransfer medium) used in common circulates.

The first circulation circuit 110 includes the first chiller 11 (firstadjustment apparatus), a needle valve 119, etc. The first circulationcircuit 110 does not include the above-described first distributionvalve 12.

The pump 11 b discharges to the flow passage 117 the first heat transfermedium stored in the tank 11 a. A first check valve 136 is provided inthe flow passage 117. The first check valve 136 permits the first heattransfer medium to flow from the first chiller 11 to a merging point P1and prohibits the first heat transfer medium from flowing from themerging point P1 to the first chiller 11. The tank 11 a of the firstchiller 11 and the B port of a second distribution valve 135 areconnected to each other by a flow passage 118. The second distributionvalve 135 (adjustment section) is a three-way valve having a commonport, an A port, and the B port. The first chiller 11 adjusts thetemperature of the first heat transfer medium to a set temperature Tc(first set temperature) and supplies the temperature-adjusted first heattransfer medium. The flow passages 117 and 118 are connected to eachother by a flow passage 116. The needle valve 119 is provided in theflow passage 116.

The second circulation circuit 120 (circulation circuit) includes aheater 121, a temperature sensor 29, a needle valve 129, etc. The secondcirculation circuit 120 does not include the above-described firstdistribution valve 12. The heater 121 (second adjustment apparatus) is aheater which can control the amount of heat generated. The heater 121includes a heating wire heater, a ceramic heater, or the like (notshown) and a flow passage 121 a through which the first heat transfermedium flows, and heats the first heat transfer medium flowing throughthe flow passage 121 a. The heater 121 adjusts the temperature of thesecond heat transfer medium (i.e., first heat transfer medium) to a settemperature Th (second set temperature) and supplies thetemperature-adjusted second heat transfer medium. The heating state ofthe heater 121 is controlled by the control section 80 on the basis ofthe temperature detected by the temperature sensor 29.

The flow passage 121 a of the heater 121 and the above-described mergingpoint P1 are connected to each other by a flow passage 127. A pump 122and a second check valve 137 are provided in the flow passage 127. Thepump 122 receives the first heat transfer medium from the flow passage121 a of the heater 121 and discharges the first heat transfer medium tothe merging point P1 through the flow passage 127. The second checkvalve 137 permits the first heat transfer medium to flow from the pump122 to the merging point P1 and prohibits the first heat transfer mediumfrom flowing from the merging point P1 to the pump 122. The flow passage121 a of the heater 121 and the A port of the second distribution valve135 are connected to each other by a flow passage 128. The flow passage127 and the flow passage 128 are connected to each other by a flowpassage 126. The needle valve 129 is provided in the flow passage 126.

The flow passage 117 and the flow passage 127 are connected to a flowpassage 135 a at the merging point P1. The flow passage 135 a isconnected to the inlet port of the heat exchanger 93. A flow passage 135b is connected to the outlet port of the heat exchanger 93. A pump 32 isprovided in the flow passage 135 b. The flow passage 135 b is connectedto the common port of the second distribution valve 135.

The second distribution valve 135 (adjustment section) continuouslychanges the ratio between the flow rate of the first heat transfermedium flowing from the flow passage 135 b to the flow passage 118 andthe flow rate of the first heat transfer medium flowing from the flowpassage 135 b to the flow passage 128. Namely, the second distributionvalve 135 changes the ratio between the first heat transfer mediumflowing from the heat exchanger 93 (first flow-through section, commonflow-through section) to the first chiller 11 and the first heattransfer medium flowing from the heat exchanger 93 (second flow-throughsection, common flow-through section) to the heater 121. The seconddistribution valve 135 continuously changes the state of flow between astate in which all (100%) of the first heat transfer medium flows fromthe flow passage 135 b to the flow passage 118 and a state in which all(100%) of the first heat transfer medium flows from the flow passage 135b to the flow passage 128. In the state in which all (100%) of the firstheat transfer medium flows from the flow passage 135 b to the flowpassage 118, the needle valve 129 adjusts the amount of the first heattransfer medium circulating from the flow passage 127 to the flowpassage 128. In the state in which all (100%) of the first heat transfermedium flows from the flow passage 135 b to the flow passage 128, theneedle valve 119 adjusts the amount of the first heat transfer mediumcirculating from the flow passage 117 to the flow passage 118. In thesecond distribution valve 135, the pressure loss of the first heattransfer medium is constant irrespective of the ratio at which the firstheat transfer medium supplied from the pump 32 is distributed betweenthe first chiller 11 and the heater 121. Notably, the seconddistribution valve 135 may continuously change the state of flow betweena state in which a portion (less than 100%, for example, 90%) of thefirst heat transfer medium flows from the flow passage 135 b to the flowpassage 118 and a state in which a portion (less than 100%, for example,90%) of the first heat transfer medium flows from the flow passage 135 bto the flow passage 128. In such a case, the flow passages 116 and 126and the needle valves 119 and 129 may be omitted. Also, the pump 32 maybe omitted.

Since the load of the pump 32 does not change irrespective of thedistribution ratio of the second distribution valve 135, the pump 32 isdriven in a constant drive state. As a result, the pump 32 circulatesthe first heat transfer medium through the first circulation circuit 110and the second circulation circuit 120. Notably, the first circulationcircuit 110 and the second circulation circuit 120 share the flowpassages 135 a and 135 b, the pump 32, and the second distribution valve135.

The control section 80 controls the temperature of the lower electrode92 to the target temperature Te. The control section 80 controls thedistribution ratio of the second distribution valve 135 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturedetected by the temperature sensor 94. Thus, the flow rate of the firstheat transfer medium flowing to the chiller 11 is adjusted; as a result,the amount of heat supplied from the first chiller 11 to the heatexchanger 93 is adjusted. Also, the flow rate of the first heat transfermedium flowing to the heater 121 is adjusted; as a result, the amount ofheat supplied from the heater 121 to the heat exchanger 93 is adjusted.

In the same manner as the manner shown in FIG. 2, in response to eachchange in the target temperature Te, the control section 80 sets the settemperature Tc of the first chiller 11 to a set temperature Tccorresponding to the target temperature Te. Subsequently, the controlsection 80 feedback-controls the output of the first chiller 11 suchthat the temperature T1 of the first heat transfer medium detected bythe temperature sensor 19 becomes equal to the set temperature Tc. Also,the control section 80 feedback-controls the distribution ratio of thesecond distribution valve 135 such that the temperature T3 of the lowerelectrode 92 detected by the temperature sensor 94 becomes equal to thetarget temperature Te.

Further, the control section 80 sets the set temperature Tc and controlsthe second distribution valve 135 on the basis of the above-describedrelation stored in the memory device 80 a. Specifically, at the point intime which precedes, by the predetermined time Δt, the first changetiming at which the target temperature Te changes from the targettemperature Te1 to the target temperature Te2, the control section 80sets the set temperature Tc to a set temperature Tc2 corresponding tothe post-change target temperature Te2. Subsequently, in order tocontrol the temperature of the lower electrode 92 to the pre-changetarget temperature Te1 until the first change timing, the controlsection 80 controls the second distribution valve 135 so as to adjustthe ratio of distribution of the first heat transfer medium between theflow passage 118 and the flow passage 128. In addition, the controlsection 80 controls the heat generation amount of the heater 121.

For example, at time t1 which precedes time t2 by a predetermined timeΔt1, the control section 80 sets the set temperature Tc such that theset temperature Tc gradually changes to a set temperature Tc (=−5° C.)corresponding to the post-change target temperature Te2 (=0° C.) Also,in order to control the temperature of the lower electrode 92 to thepre-change target temperature Te1 (=90° C.) until time t2, the controlsection 80 controls the second distribution valve 135 to decrease theratio of distribution of the first heat transfer medium to the flowpassage 118 and increase the ratio of distribution of the first heattransfer medium to the flow passage 128. At that time, the first heattransfer medium heated by the heater 121 is supplied to the flowpassages 127 and 135 a, and thus supplied to the heat exchanger 93.

Notably, during the predetermined time Δt1, the heater 121 may bestopped (heating of the first heat transfer medium may be stopped). Insuch a case, by the second distribution valve 135, the ratio ofdistribution of the first heat transfer medium to the flow passage 118is decreased, and the ratio of distribution of the first heat transfermedium to the flow passage 128 is increased. Also, in the state in whichthe first heat transfer medium flows thorough the flow passages 127, 135a, and 128, the first heat transfer medium may be heated by the heater121 without changing the distribution ratio of the second distributionvalve 135. By these operations as well, during the period from time t1to time t2, the temperature of the lower electrode 92 can be controlledto the pre-change target temperature Te1 (=90° C.)

At time t5, the control section 80 sets the set temperature Tc such thatthe set temperature Tc gradually changes to a set temperature Tc (=50°C.) corresponding to a post-change target temperature Te4 (=90° C.).Also, the control section 80 controls the second distribution valve 135to decrease the ratio of distribution of the first heat transfer mediumto the flow passage 118 and increase the ratio of distribution of thefirst heat transfer medium to the flow passage 128. At that time, thecontrol section 80 supplies the first heat transfer medium, adjusted tothe set temperature Th by the heater 121, to the flow passages 127 and135 a. As a result, the first heat transfer medium adjusted to the settemperature Th is supplied to the heat exchanger 93, whereby thetemperature of the lower electrode 92 is raised sharply. The settemperature Th is set on the basis of the target temperature Te of thelower electrode 92 and the temperature detected by the temperaturesensor 94.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the first embodiment will be described.

The temperature control system 200 includes the first chiller 11, thefirst circulation circuit 110, the heater 121, and the secondcirculation circuit 120. Therefore, the temperature of the lowerelectrode 92 can be controlled by causing the first heat transfer medium(second heat transfer medium) to flow from the first chiller 11 and theheater 121 to the heat exchanger 93 (first flow-through section, secondflow-through section) and supplying heat from the heat exchanger 93 tothe lower electrode 92.

The control section 80 sets the set temperature Tc on the basis of therelation between lapse of time and the target temperature Te, whichrelation is stored in the memory device 80 a. Specifically, at a pointin time which precedes, by the predetermined time Δt, the first changetiming at which the target temperature Te changes to a targettemperature Te (i.e., first target temperature) to be reached bysupplying the first heat transfer medium from the first chiller 11 tothe heat exchanger 93, the control section 80 sets the set temperatureTc to a set temperature Tc corresponding to the post-change targettemperature Te. Therefore, by the first change timing, the first chiller11 can store in the tank 11 a the first heat transfer medium adjusted tothe set temperature Tc corresponding to the post-change targettemperature Te. Accordingly, after the target temperature Te haschanged, the first chiller 11 can supply from the tank 11 a the firstheat transfer medium whose temperature has been adjusted beforehand,thereby enhancing the followability of the temperature of the lowerelectrode 92 to the target temperature Te. The only action required isto set the set temperature Tc to a set temperature Tc corresponding tothe post-change target temperature Te at the point in time whichprecedes the first change timing by the predetermined time Δt, andmaintaining the drive state of the first chiller 11 at a high level atall times is unnecessary. Therefore, the energy consumption of the firstchiller 11 can be reduced.

In order to control the temperature of the lower electrode 92 to thepre-change target temperature Te until the first change timing, thecontrol section 80 adjusts the amount of heat supplied from the firstchiller 11 to the heat exchanger 93, and thus adjusts the amount of heatsupplied from the heat exchanger 93 to the lower electrode 92, by usingthe second distribution valve 135. In addition, the control section 80adjusts the amount of heat supplied from the heater 121 to the heatexchanger 93, and thus adjusts the amount of heat supplied from the heatexchanger 93 to the lower electrode 92, by using the second distributionvalve 135. Therefore, even in the case where it is difficult to controlthe temperature of the lower electrode 92 to the target temperature Teby merely adjusting the amount of heat supplied from the first chiller11 to the heat exchanger 93 by using the second distribution valve 135,it is possible to prevent deviation of the temperature of the lowerelectrode 92 from the target temperature Te.

The second distribution valve 135 changes the ratio between the firstheat transfer medium (common heat transfer medium) flowing from the heatexchanger 93 (common flow-through section) to the first chiller 11 andthe first heat transfer medium flowing from the heat exchanger 93 to theheater 121. Namely, the second distribution valve 135 changes the ratiobetween the first heat transfer medium flowing from the first chiller 11to the heat exchanger 93 and the first heat transfer medium flowing fromthe heater 121 to the heat exchanger 93. Accordingly, the temperature ofthe lower electrode 92 can be controlled to the target temperature Te bychanging the amount of heat supplied to the heat exchanger 93 by usingthe second distribution valve 135.

In the second distribution valve 135, the pressure loss of the firstheat transfer medium is constant irrespective of the ratio between thefirst heat transfer medium flowing from the heat exchanger 93 to thefirst chiller 11 and the first heat transfer medium flowing from theheat exchanger 93 to the heater 121. Therefore, in the case where thefirst heat transfer medium is caused by the pump 32 to circulate throughthe first circulation circuit 110 and the second circulation circuit120, it is unnecessary to control the drive state of the pump 32, andthe pump 32 can be driven in a constant drive state.

Notably, in the second distribution valve 135, the pressure loss of thefirst heat transfer medium may change in accordance with the ratiobetween the first heat transfer medium flowing from the heat exchanger93 to the first chiller 11 and the first heat transfer medium flowingfrom the heat exchanger 93 to the heater 121. In such a case, the drivestate of the pump 32 is changed appropriately.

Third Embodiment

A third embodiment will now be described. In the following description,the difference between the third embodiment and the second embodimentwill be mainly described. Notably, portions identical with those of thefirst and second embodiments are denoted by the same reference numerals,and their description will not be repeated.

As shown in FIG. 4, a temperature control system 300 of the presentembodiment is identical with the temperature control system 200 of thesecond embodiment except that the second distribution valve 135 isreplaced with a third distribution valve 335.

The third distribution valve 335 (adjustment section) is a four-wayvalve having a common port, an H port, a B port, and a C port. The flowpassage 118 is connected to the C port. The flow passage 118 isconnected to the tank 11 a of the first chiller 11. A flow passage 239is connected to the B port. The flow passage 239 is connected to theflow passage 135 a at the merging point P1. A third check valve 138 isprovided in the flow passage 239. The third check valve 138 permits thefirst heat transfer medium to flow from the third distribution valve 335to the merging point P1 and prohibits the first heat transfer mediumfrom flowing from the merging point P1 to the third distribution valve335. The flow passage 128 is connected to the H port. The flow passage128 is connected to the flow passage 121 a of the heater 121.

The third distribution valve 335 continuously changes the ratio amongthe flow rate of the first heat transfer medium flowing from the flowpassage 135 b to the flow passage 118, the flow rate of the first heattransfer medium flowing from the flow passage 135 b to the flow passage239, and the flow rate of the first heat transfer medium flowing fromthe flow passage 135 b to the flow passage 128. Namely, the thirddistribution valve 335 changes the ratio among the first heat transfermedium flowing from the heat exchanger 93 to the first chiller 11, thefirst heat transfer medium flowing out of the heat exchanger 93 andreturning to the heat exchanger 93 without flowing through the firstchiller 11 and the heater 121, and the first heat transfer mediumflowing from the heat exchanger 93 to the heater 121. The thirddistribution valve 335 continuously changes the state of flow among astate in which all (100%) of the first heat transfer medium flows fromthe flow passage 135 b to the flow passage 118, a state in which thefirst heat transfer medium flows from the flow passage 135 b to the flowpassages 118 and 239, a state in which all (100%) of the first heattransfer medium flows from the flow passage 135 b to the flow passage239, a state in which the first heat transfer medium flows from the flowpassage 135 b to the flow passages 239 and 128, and a state in which all(100%) of the first heat transfer medium flows from the flow passage 135b to the flow passage 128. In the third distribution valve 335, thepressure loss of the first heat transfer medium is constant irrespectiveof the ratio at which the first heat transfer medium supplied from thepump 32 is distributed among the flow passages 118, 239, and 128.

Since the load of the pump 32 does not change irrespective of thedistribution ratio of the third distribution valve 335, the pump 32 isdriven in a constant drive state. As a result, the pump 32 circulatesthe first heat transfer medium through the first circulation circuit 110and the second circulation circuit 120. The first circulation circuit110 and the second circulation circuit 120 share the flow passages 135 aand 135 b, the pump 32, and the third distribution valve 335.

The control section 80 controls the temperature of the lower electrode92 to the target temperature Te. The control section 80 controls thedistribution ratio of the third distribution valve 335 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturedetected by the temperature sensor 94. Also, in the same manner as themanner shown in FIG. 2, in response to each change in the targettemperature Te, the control section 80 sets the set temperature Tc ofthe first chiller 11 to a set temperature Tc corresponding to the targettemperature Te. Also, the control section 80 controls the heatgeneration amount of the heater 121.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the second embodiment will be described.

The temperature control system 300 includes the third distribution valve335 which changes the ratio among the first heat transfer medium flowingfrom the heat exchanger 93 to the first chiller 11, the first heattransfer medium flowing out of the heat exchanger 93 and returning tothe heat exchanger 93 without flowing through the first chiller 11 andthe heater 121, and the first heat transfer medium flowing from the heatexchanger 93 to the heater 121. Namely, the third distribution valve 335changes the ratio among the first heat transfer medium flowing from thefirst chiller 11 to the heat exchanger 93, the first heat transfermedium flowing out of the heat exchanger 93 and returning to the heatexchanger 93 without flowing through the first chiller 11 and the heater121, and the first heat transfer medium flowing from the heater 121 tothe heat exchanger 93. Therefore, the ratio among the amount of heatthat the heat exchanger 93 receives from the first chiller 11, theamount of heat returned to the heat exchanger 93, and the amount of heatthat the heat exchanger 93 receives from the heater 121 can be changedby the third distribution valve 335. Accordingly, the temperature of thelower electrode 92 can be controlled to the target temperature Te bychanging the amount of heat supplied to the heat exchanger 93 by usingthe third distribution valve 335.

Even in the case where the set temperature Tc is set to a settemperature Tc corresponding to the post-change target temperature Te atthe point in time which precedes the first change timing by thepredetermined time Δt, deviation of the temperature of the lowerelectrode 92 from the target temperature Te can be prevented by changingthe amount of heat supplied to the heat exchanger 93 by using the thirddistribution valve 335.

Further, it is possible to realize a state in which the first heattransfer medium flowing out of the heat exchanger 93 is returned as itis to the heat exchanger 93 without allowing the first heat transfermedium to flow from the heat exchanger 93 to the first chiller 11 andthe heater 121.

Fourth Embodiment

A fourth embodiment will now be described. In the following description,the difference between the fourth embodiment and the second embodimentwill be mainly described. Notably, portions identical with those of thefirst through third embodiments are denoted by the same referencenumerals, and their description will not be repeated.

As shown in FIG. 5, a temperature control system 400 of the presentembodiment is identical with the temperature control system 200 of thesecond embodiment except that the heater 121 is replaced with a secondchiller 21.

The second chiller 21 (second adjustment apparatus) includes a tank 21a, a pump 21 b, etc. The second chiller 21 adjusts the temperature ofthe second heat transfer medium to a set temperature Th (second settemperature) higher than the set temperature Tc (first set temperature).The second heat transfer medium is the same liquid as the first heattransfer medium. Namely, the first circulation circuit 110 and thesecond circulation circuit 120 are circuits through which theabove-described first heat transfer medium (common heat transfer medium)used in common circulates. The tank 21 a (second tank) stores the secondheat transfer medium (i.e. first heat transfer medium) adjusted to theset temperature Th. The pump 21 b discharges the first heat transfermedium stored in the tank 21 a to the flow passage 127.

The control section 80 controls the set temperature Tc of the firstchiller 11, the set temperature Th of the second chiller 21, and thedistribution ratio of the second distribution valve 135 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturesdetected by the temperature sensors 19, 29, and 94. Thus, the flow rateof the first heat transfer medium flowing from the first chiller 11 tothe heat exchanger 93 and the flow rate of the first heat transfermedium flowing from the second chiller 21 to the heat exchanger 93 areadjusted; as a result, the amount of heat supplied to the heat exchanger93 is adjusted. Namely, the second distribution valve 135 adjusts theamount of heat supplied from the heat exchanger 93 to the lowerelectrode 92. In order to render the temperature of the lower electrode92 coincident with the target temperature Te, the control section 80sets the set temperature Tc of the first chiller 11 to a set temperatureTc corresponding to the target temperature Te, sets the set temperatureTh of the second chiller 21 to a set temperature Th corresponding to thetarget temperature Te, and feedback-controls the distribution ratio ofthe second distribution valve 135.

FIG. 6 is a time chart showing changes in the target temperature Te ofthe lower electrode 92, the set temperature Tc of the first chiller 11,and the set temperature Th of the second chiller 21. As shown in FIG. 6,the target temperature Te of the lower electrode 92 changes in the samemanner as in the case shown in FIG. 2.

The control section 80 allows and stops the supply of the first heattransfer medium from the first chiller 11 and the second chiller 21 inaccordance with changes in the target temperature Te. The first chiller11 and the second chiller 21 start the supply of the first heat transfermedium by driving the pumps 11 b and 21 b, respectively, and stop thesupply of the first heat transfer medium by stopping the pumps 11 b and21 b. For example, in the case where the target temperature Te is higherthan 20° C. (boundary temperature), the control section 80 stops thesupply of the first heat transfer medium from the first chiller 11, andallows the supply of the first heat transfer medium from the secondchiller 21. Meanwhile, in the case where the target temperature Te isequal to or lower than 20° C., the control section 80 allows the supplyof the first heat transfer medium from the first chiller 11, and stopsthe supply of the first heat transfer medium from the second chiller 21.

The control section 80 sets the set temperature Tc of the first chiller11 to a set temperature Tc corresponding to the target temperature Te.For example, when the target temperature Te is 90° C., the controlsection 80 sets the set temperature Tc to 20° C. and stops the pump lib.When the target temperature Te is 0° C., the control section 80 sets theset temperature Tc to −5° C. and drives the pump lib. Similarly, whenthe target temperature Te is −20° C., the control section 80 sets theset temperature Tc to −25° C. and drives the pump lib. Subsequently, thecontrol section 80 feedback-controls the output of the first chiller 11such that the temperature T1 of the first heat transfer medium detectedby the temperature sensor 19 becomes equal to the set temperature Tc.Also, the control section 80 feedback-controls the distribution ratio ofthe second distribution valve 135 such that the temperature T3 of thelower electrode 92 detected by the temperature sensor 94 becomes equalto the target temperature Te.

Also, the control section 80 sets the set temperature Th of the secondchiller 21 to a set temperature Th corresponding to the targettemperature Te. For example, when the target temperature Te is 90° C.,the control section 80 sets the set temperature Th to 85° C. and drivesthe pump 21 b. When the target temperature Te is 0° C., the controlsection 80 sets the set temperature Th to 20° C. and stops the pump 21b. Similarly, when the target temperature Te is −20° C., the controlsection 80 sets the set temperature Th to 20° C. and stops the pump 21b. Subsequently, the control section 80 feedback-controls the output ofthe second chiller 21 such that the temperature T2 of the first heattransfer medium detected by the temperature sensor 29 becomes equal tothe set temperature Th. Also, the control section 80 feedback-controlsthe distribution ratio of the second distribution valve 135 such thatthe temperature T3 of the lower electrode 92 detected by the temperaturesensor 94 becomes equal to the target temperature Te.

Further, the control section 80 sets the set temperature Tc on the basisof the above-described relation stored in the memory device 80 a.Specifically, at the point in time which precedes, by the predeterminedtime Δt, the change timing at which the target temperature Te changesfrom the target temperature Te1 to the target temperature Te2, thecontrol section 80 sets the set temperature Tc to a set temperature Tc2corresponding to the post-change target temperature Te2. Subsequently,in order to control the temperature of the lower electrode 92 to thepre-change target temperature Te1 until the change timing, the controlsection 80 controls the second distribution valve 135 so as to adjustthe ratio of distribution of the first heat transfer medium between theflow passage 118 and the flow passage 128. As a result, the first heattransfer medium adjusted to the set temperature Tc2 corresponding to thepost-change target temperature Te2 is stored in the tank 11 a by thechange timing.

For example, at time t11 which precedes time t12 by a predetermined timeΔt1, the control section 80 sets the set temperature Tc such that theset temperature Tc gradually changes to a set temperature Tc2 (=−5° C.)corresponding to the post-change target temperature Te2 (=0° C.). Atthat time, the pump 11 b of the first chiller 11 is not driven, thecontrol section 80 does not change the distribution ratio of the seconddistribution valve 135. Namely, the first chiller 11 stores in the tank11 a the first heat transfer medium whose temperature has been adjustedto the set temperature Tc2 (=−5° C.) in a state in which the firstchiller 11 stops the supply of the first heat transfer medium. Notably,instead of gradually changing the set temperature Tc at time t11, theset temperature Tc may be instantaneously set to the set temperature Tc2(=−5° C.) corresponding to the post-change target temperature Te2 (=0°C.)

Also, at time t13 which precedes time t14 by a predetermined time Δt2,the control section 80 sets the set temperature Tc such that the settemperature Tc gradually changes to a set temperature Tc3 (=−25° C.)corresponding to a post-change target temperature Te3 (=−20° C.) Also,in order to control the temperature of the lower electrode 92 to thepre-change target temperature Te2 (=0° C.) until time t14, the controlsection 80 controls the second distribution valve 135 to decrease theratio of distribution of the first heat transfer medium to the flowpassage 118 and increase the ratio of distribution of the first heattransfer medium to the flow passage 128. Notably, instead of graduallychanging the set temperature Tc at time t13, the set temperature Tc maybe instantaneously set to the set temperature Tc3 (=−25° C.)corresponding to the post-change target temperature Te3 (=−20° C.)

Also, at time t15 which precedes time t16 by a predetermined time Δt3,the control section 80 sets the set temperature Th such that the settemperature Th gradually changes to a set temperature Th4 (=85° C.)corresponding to a post-change target temperature Te4 (=90° C.). At thattime, the pump 21 b of the second chiller 21 is not driven, the controlsection 80 does not change the distribution ratio of the seconddistribution valve 135. Namely, the second chiller 21 stores in the tank21 a the first heat transfer medium whose temperature has been adjustedto the set temperature Tc4 (=85° C.) in a state in which the secondchiller 21 stops the supply of the first heat transfer medium. Notably,instead of gradually changing the set temperature Th at time t15, theset temperature Th may be instantaneously set to the set temperature Th4(=85° C.) corresponding to the post-change target temperature Te4 (=90°C.)

In the same manner as in the first embodiment, the control section 80sets the predetermined time Δt in accordance with an equation ofΔt=C×(T1−Tc2)/q. The output q may be the maximum output qm or themaximum efficiency output qe. Notably, in the case where the firstchiller 11 has already operated to produce an output ql, the difference(qm−ql) between the maximum output qm and the output ql or thedifference (qe−ql) between the maximum output qm and the output ql maybe used as the output q. Also, in the case where heating is performed bythe second chiller 21, the control section 80 sets the predeterminedtime Δt in accordance with an equation of Δt=C×(Th2−T2)/q. Thetemperature T2 is the temperature of the second heat transfer mediumdetected by the temperature sensor 29.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the second embodiment will be described.

The temperature control system 400 includes the first chiller 11, thefirst circulation circuit 110, the second chiller 21, and the secondcirculation circuit 120. Therefore, the temperature of the lowerelectrode 92 can be controlled to the target temperature Te by causingthe first heat transfer medium (second heat transfer medium) to flowfrom the first chiller 11 and the second chiller 21 to the heatexchanger 93 (first flow-through section, second flow-through section)and supplying heat from the heat exchanger 93 to the lower electrode 92.

The control section 80 sets the set temperature Tc on the basis of therelation between lapse of time and the target temperature Te, whichrelation is stored in the memory device 80 a. Specifically, as shown inFIG. 6, at the point in time which precedes, by the predetermined timeΔt1, time t12 (first change timing) at which the target temperature Techanges to the target temperature Te2 (=0° C.) to be reached bysupplying the first heat transfer medium from the first chiller 11 tothe heat exchanger 93, the control section 80 sets the set temperatureTc to the set temperature Tc2 corresponding to the post-change targettemperature Te2 (=0° C.). Therefore, by time t12, the first chiller 11can store in the tank 11 a the first heat transfer medium adjusted tothe set temperature Tc2 corresponding to the post-change targettemperature Te2 (=0° C.) in a state in which the first chiller 11 stopsthe supply of the first heat transfer medium. Accordingly, after thetarget temperature Te has changed, the first chiller 11 can supply fromthe tank 11 a the first heat transfer medium whose temperature has beenadjusted beforehand, thereby enhancing the followability of thetemperature of the lower electrode 92 to the target temperature Te2 (=0°C.). The only action required is to set the set temperature Tc to theset temperature Tc2 corresponding to the post-change target temperatureTe2 (=0° C.) at the point in time which precedes time t12 by thepredetermined time Δt1, and maintaining the drive state of the firstchiller 11 at a high level at all times is unnecessary. Therefore, theenergy consumption of the first chiller 11 can be reduced.

Notably, the flow passage 116 which connects the flow passage 117 andthe flow passage 118 together may be provided, and the needle valve 119which adjusts the amount of the first heat transfer medium circulatingfrom the flow passage 117 to the flow passage 118 may be provided in theflow passage 116. Similarly, the flow passage 126 which connects theflow passage 127 and the flow passage 128 together may be provided, andthe needle valve 129 which adjusts the amount of the first heat transfermedium circulating from the flow passage 127 to the flow passage 128 maybe provided in the flow passage 126.

Fifth Embodiment

A fifth embodiment will now be described. In the following description,the difference between the fifth embodiment and the fourth embodimentwill be mainly described. Notably, portions identical with those of thefirst through fourth embodiments are denoted by the same referencenumerals, and their description will not be repeated.

As shown in FIG. 7, a temperature control system 500 of the presentembodiment includes the first circulation circuit 110, the secondcirculation circuit 120, a third circulation circuit 130, the controlsection 80, etc.

The first circulation circuit 110 is a circuit through which theabove-described first heat transfer medium circulates. The secondcirculation circuit 120 is a circuit which is independent of the firstcirculation circuit 110 and through which the above-described secondheat transfer medium circulates. The third circulation circuit 130 is acircuit which is independent of the first circulation circuit 110 andthe second circulation circuit 120 and through which a third heattransfer medium circulates.

The third heat transfer medium is, for example, a fluorine-based inertliquid. The lowest usable temperature of the third heat transfer mediumis lower than those of the first heat transfer medium and the secondheat transfer medium. The highest usable temperature of the third heattransfer medium is higher than those of the first heat transfer mediumand the second heat transfer medium. Namely, the usable temperaturerange of the third heat transfer medium is wider than those of the firstheat transfer medium and the second heat transfer medium. Therefore, thethird heat transfer medium is more expensive than the first heattransfer medium and the second heat transfer medium.

The first circulation circuit 110 includes the first chiller 11, a firstflow-through section 114, etc. The flow passage 117 is connected to thefirst flow-through section 114. The first flow-through section 114 isprovided inside a heat exchanger 131, and the first heat transfer mediumflows through the first flow-through section 114. The flow passage 118is connected to the first flow-through section 114. The flow passage 118is connected to the tank 11 a of the first chiller 11.

The second circulation circuit 120 includes the second chiller 21, asecond flow-through section 124, etc. The flow passage 127 is connectedto the second flow-through section 124. The second flow-through section124 is provided inside a heat exchanger 132, and the second heattransfer medium flows through the second flow-through section 124. Theflow passage 128 is connected to the second flow-through section 124.The flow passage 128 is connected to the tank 21 a of the second chiller21.

The third circulation circuit 130 includes a third flow-through section133, a fourth flow-through section 134, a fourth distribution valve 435,the first check valve 136, the second check valve 137, the pump 32, etc.

The third flow-through section 133 is provided inside the heat exchanger131, and the third heat transfer medium flows through the thirdflow-through section 133. The third flow-through section 133 isintegrated with the first flow-through section 114 and exchange heatwith the first flow-through section 114.

A flow passage 133 a is connected to the third flow-through section 133.The first check valve 136 is provided in the flow passage 133 a. Thefirst check valve 136 permits the third heat transfer medium to flowfrom the third flow-through section 133 to the merging point P1 andprohibits the third heat transfer medium from flowing from the mergingpoint P1 to the third flow-through section 133.

A flow passage 134 a is connected to the fourth flow-through section134. The second check valve 137 is provided in the flow passage 134 a.The second check valve 137 permits the third heat transfer medium toflow from the fourth flow-through section 134 to the merging point P1and prohibits the third heat transfer medium from flowing from themerging point P1 to the fourth flow-through section 134.

The flow passage 133 a and the flow passage 134 a are connected to theflow passage 135 a at the merging point P1. The flow passage 135 a isconnected to the inlet port of the heat exchanger 93. The flow passage135 b is connected to the outlet port of the heat exchanger 93. The pump32 is provided in the flow passage 135 b. The flow passage 135 b isconnected to the common port of the fourth distribution valve 435.

The fourth distribution valve 435 (adjustment section) is a three-wayvalve having the common port, an A port, and a B port. A flow passage135 c is connected to the B port. A flow passage 135 d is connected tothe A port. The flow passage 135 c is connected to the thirdflow-through section 133 of the heat exchanger 131. The flow passage 135d is connected to the fourth flow-through section 134 of the heatexchanger 132.

The fourth distribution valve 435 continuously changes the ratio betweenthe flow rate of the third heat transfer medium flowing from the flowpassage 135 b to the flow passage 135 c and the flow rate of the thirdheat transfer medium flowing from the flow passage 135 b to the flowpassage 135 d. Namely, the fourth distribution valve 435 changes theratio between the third heat transfer medium flowing from the heatexchanger 93 to the third flow-through section 133 and the third heattransfer medium flowing from the heat exchanger 93 to the fourthflow-through section 134. The fourth distribution valve 435 continuouslychanges the state of flow between a state in which all (100%) of thethird heat transfer medium flows from the flow passage 135 b to the flowpassage 135 c and a state in which all (100%) of the third heat transfermedium flows from the flow passage 135 b to the flow passage 135 d. Inthe fourth distribution valve 435, the pressure loss of the third heattransfer medium is constant irrespective of the ratio at which the thirdheat transfer medium supplied from the pump 32 is distributed betweenthe third flow-through section 133 of the heat exchanger 131 and thefourth flow-through section 134 of the heat exchanger 132.

Since the load of the pump 32 does not change irrespective of thedistribution ratio of the fourth distribution valve 435, the pump 32 isdriven in a constant drive state. As a result, the pump 32 circulatesthe third heat transfer medium through the third circulation circuit130. The third circulation circuit 130 does not include a tank forstoring the third heat transfer medium.

The control section 80 controls the temperature of the lower electrode92 to the target temperature Te. The control section 80 controls thedistribution ratio of the fourth distribution valve 435 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturedetected by the temperature sensor 94. Thus, the flow rate of the thirdheat transfer medium flowing through the third flow-through section 133is adjusted; as a result, the amount of heat exchanged between the firstflow-through section 114 and the third flow-through section 133 isadjusted. Also, the flow rate of the third heat transfer medium flowingthrough the fourth flow-through section 134 is adjusted; as a result,the amount of heat exchanged between the second flow-through section 124and the fourth flow-through section 134 is adjusted.

The control section 80 controls the set temperature Tc of the firstchiller 11, the set temperature Th of the second chiller 21, and thedistribution ratio of the fourth distribution valve 435 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturesdetected by the temperature sensors 19, 29, and 94. Thus, the amount ofheat supplied to the heat exchanger 93 is adjusted. In order to renderthe temperature of the lower electrode 92 coincident with the targettemperature Te, the control section 80 sets the set temperature Tc ofthe first chiller 11 to a set temperature Tc corresponding to the targettemperature Te, sets the set temperature Th of the second chiller 21 toa set temperature Th corresponding to the target temperature Te, andfeedback-controls the distribution ratio of the fourth distributionvalve 435.

In the same manner as in the fourth embodiment, the control section 80controls the set temperature Tc of the first chiller 11, the settemperature Th of the second chiller 21, and the distribution ratio ofthe fourth distribution valve 435. Also, in the same manner as in thefourth embodiment, the control section 80 may allow and stop the supplyof the first heat transfer medium from the first chiller 11, and allowand stop the supply of the second heat transfer medium from the secondchiller 21. Alternatively, the control section 80 may allow the firstchiller 11 to supply the first heat transfer medium at all times andallow the second chiller 21 to supply the second heat transfer medium atall times.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the fourth embodiment will be described.

The third circulation circuit 130 is independent of the firstcirculation circuit 110 and the second circulation circuit 120, and thethird heat transfer medium whose usable temperature range is wider thanthat of the first heat transfer medium circulates through the thirdcirculation circuit 130. Therefore, the third heat transfer medium,which may be expensive, is caused to circulate only through the thirdcirculation circuit 130, whereby the amount of use of the third heattransfer medium can be reduced. Additionally, the third circulationcircuit 130 does not include a tank for storing the third heat transfermedium. Therefore, the amount of the third heat transfer mediumcirculating through the third circulation circuit 130 can be reducedfurther.

The third circulation circuit 130 includes the third flow-throughsection 133 through which the third heat transfer medium flows and whichexchanges heat with the first flow-through section 114, and the fourthflow-through section 134 through which the third heat transfer mediumflows and which exchanges heat with the second flow-through section 124.Therefore, the thermal energy supplied to the first flow-through section114 can be supplied to the third flow-through section 133 through heatexchange between the first flow-through section 114 and the thirdflow-through section 133. Similarly, the thermal energy supplied to thesecond flow-through section 124 can be supplied to the fourthflow-through section 134 through heat exchange between the secondflow-through section 124 and the fourth flow-through section 134. Thethird circulation circuit 130 causes the third heat transfer medium toflow from the third flow-through section 133 and the fourth flow-throughsection 134 to the heat exchanger 93, which exchanges heat with thelower electrode 92, and return to the third flow-through section 133 andthe fourth flow-through section 134. Therefore, via the third heattransfer medium, thermal energy can be supplied from the thirdflow-through section 133 and the fourth flow-through section 134 to theheat exchanger 93, which exchanges heat with the lower electrode 92.

The fourth distribution valve 435 changes the ratio between the thirdheat transfer medium flowing from the heat exchanger 93 to the thirdflow-through section 133 and the third heat transfer medium flowing fromthe heat exchanger 93 to the fourth flow-through section 134. Therefore,the ratio between the amount of heat supplied from the thirdflow-through section 133 to the heat exchanger 93 and the amount of heatsupplied from the fourth flow-through section 134 to the heat exchanger93 can be changed by the fourth distribution valve 435. Accordingly, thetemperature of the lower electrode 92 can be controlled to the targettemperature Te by changing the amount of heat supplied to the heatexchanger 93 by using the fourth distribution valve 435.

Even in the case where the set temperature Tc is set to a settemperature Tc corresponding to the post-change target temperature Te atthe point in time which precedes the above-described first change timingby the predetermined time Δt, deviation of the temperature of the lowerelectrode 92 from the target temperature Te can be prevented by changingthe amount of heat supplied to the heat exchanger 93 by using the fourthdistribution valve 435.

The amount of the third heat transfer medium circulating through thethird circulation circuit 130 can be reduced. Accordingly, thetemperature of the third heat transfer medium can be changed quickly,whereby responsiveness in controlling the temperature of the lowerelectrode 92 can be enhanced.

Sixth Embodiment

A sixth embodiment will now be described. In the following description,the difference between the sixth embodiment and the fifth embodimentwill be mainly described. Notably, portions identical with those of thefirst through fifth embodiments are denoted by the same referencenumerals, and their description will not be repeated.

As shown in FIG. 8, a temperature control system 600 of the presentembodiment is identical with the temperature control system 500 of thefifth embodiment except that the fourth distribution valve 435 isreplaced with a fifth distribution valve 535.

The fifth distribution valve 535 (adjustment section) is a four-wayvalve having a common port, an H port, a B port, and a C port. The flowpassage 235 is connected to the C port. The flow passage 235 isconnected to the third flow-through section 133 of the heat exchanger131. The flow passage 239 is connected to the B port. The flow passage239 is connected to the flow passage 135 a at the merging point P1. Thethird check valve 138 is provided in the flow passage 239. The thirdcheck valve 138 permits the first heat transfer medium to flow from thefifth distribution valve 535 to the merging point P1 and prohibits thefirst heat transfer medium from flowing from the merging point P1 to thefifth distribution valve 535. The flow passage 237 is connected to the Hport. The flow passage 237 is connected to the fourth flow-throughsection 134 of the heat exchanger 132.

The fifth distribution valve 535 continuously changes the ratio amongthe flow rate of the third heat transfer medium flowing from the flowpassage 135 b to the flow passage 235, the flow rate of the third heattransfer medium flowing from the flow passage 135 b to the flow passage239, and the flow rate of the third heat transfer medium flowing fromthe flow passage 135 b to the flow passage 237. Namely, the fifthdistribution valve 535 changes the ratio among the third heat transfermedium flowing from the heat exchanger 93 to the third flow-throughsection 133, the third heat transfer medium flowing out of the heatexchanger 93 and returning to the heat exchanger 93 without flowingthrough the third flow-through section 133 and the fourth flow-throughsection 134, and the third heat transfer medium flowing from the heatexchanger 93 to the fourth flow-through section 134. The fifthdistribution valve 535 continuously changes the state of flow among astate in which all (100%) of the third heat transfer medium flows fromthe flow passage 135 b to the flow passage 235, a state in which thethird heat transfer medium flows from the flow passage 135 b to the flowpassages 235 and 239, a state in which all (100%) of the third heattransfer medium flows from the flow passage 135 b to the flow passage239, a state in which the third heat transfer medium flows from the flowpassage 135 b to the flow passages 239 and 237, and a state in which all(100%) of the third heat transfer medium flows from the flow passage 135b to the flow passage 237. In the fifth distribution valve 535, thepressure loss of the third heat transfer medium is constant irrespectiveof the ratio at which the third heat transfer medium supplied from thepump 32 is distributed among the flow passages 235, 239, and 237.

Since the load of the pump 32 does not change irrespective of thedistribution ratio of the fifth distribution valve 535, the pump 32 isdriven in a constant drive state. As a result, the pump 32 circulatesthe third heat transfer medium through the heat exchanger 93.

The control section 80 controls the temperature of the lower electrode92 to the target temperature Te. The control section 80 controls thedistribution ratio of the fifth distribution valve 535 on the basis ofthe target temperature Te of the lower electrode 92 and the temperaturedetected by the temperature sensor 94. Also, in the same manner as themanner shown in FIG. 6, in response to each change in the targettemperature Te, the control section 80 sets the set temperature Tc ofthe first chiller 11 to a set temperature Tc corresponding to the targettemperature Te and sets the set temperature Th of the second chiller 21to a set temperature Th corresponding to the target temperature Te.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the fifth embodiment will be described.

The fifth distribution valve 535 changes the ratio among the third heattransfer medium flowing from the heat exchanger 93 to the thirdflow-through section 133, the third heat transfer medium flowing out ofthe heat exchanger 93 and returning to the heat exchanger 93 withoutflowing through the third flow-through section 133 and the fourthflow-through section 134, and the third heat transfer medium flowingfrom the heat exchanger 93 to the fourth flow-through section 134.Therefore, the ratio among the amount of heat that the heat exchanger 93receives from the third flow-through section 133, the amount of heatreturned to the heat exchanger 93, and the amount of heat that the heatexchanger 93 receives from the fourth flow-through section 134 can bechanged by the fifth distribution valve 535. Accordingly, thetemperature of the lower electrode 92 can be controlled to the targettemperature Te by changing the amount of heat supplied to the heatexchanger 93 by using the fifth distribution valve 535.

Even in the case where the set temperature Tc is set to a settemperature Tc corresponding to the post-change target temperature Te atthe point in time which precedes the first change timing by thepredetermined time Δt, deviation of the temperature of the lowerelectrode 92 from the target temperature Te can be prevented by changingthe amount of heat supplied to the heat exchanger 93 by using the fifthdistribution valve 535.

It is possible to realize a state in which the third heat transfermedium flowing out of the heat exchanger 93 is returned as it is to theheat exchanger 93 without allowing the third heat transfer medium toflow from the heat exchanger 93 to the third flow-through section 133and the fourth flow-through section 134.

Seventh Embodiment

A seventh embodiment will now be described. In the followingdescription, the difference between the seventh embodiment and the firstand fifth embodiments will be mainly described. Notably, portionsidentical with those of the first through sixth embodiments are denotedby the same reference numerals, and their description will not berepeated.

As shown in FIG. 9, a temperature control system 700 of the presentembodiment includes a heater 96 for directly heating the lower electrode92, instead of the second circulation circuit 120 of the temperaturecontrol system 500 of the fifth embodiment.

The first circulation circuit 110 is a circuit through which theabove-described first heat transfer medium circulates. A thirdcirculation circuit 230 is a circuit which is independent of the firstcirculation circuit 110 and through which the above-described third heattransfer medium circulates.

The heater 96 is a heater which can control the amount of heatgenerated. The heater 96 includes a heating wire heater, a ceramicheater, or the like and is integrated with the lower electrode 92. Theheating state of the heater 96 is controlled by the control section 80(adjustment section).

A sixth distribution valve 35 (adjustment section) is a three-way valvehaving a common port, an A port, and a B port. The third flow-throughsection 133 and the common port of the sixth distribution valve 35 areconnected to each other by a flow passage 36. The A port of the sixthdistribution valve 35 and the inlet port of the heat exchanger 93 areconnected to each other by a flow passage 37. A flowmeter 33 is providedin the flow passage 37. The flowmeter 33 measures the flow rate of thethird heat transfer medium flowing through the flow passage 37.

The outlet port of the heat exchanger 93 and the third flow-throughsection 133 are connected to each other by a flow passage 39. The B portof the sixth distribution valve 35 and the flow passage 39 are connectedto each other by a flow passage 38. The pump 32 is provided in the flowpassage 39. In the flow passage 39, the pump 32 sucks the third heattransfer medium from the heat exchanger 93 side and discharges the thirdheat transfer medium toward the third flow-through section 133.

The sixth distribution valve 35 continuously changes the ratio betweenthe flow rate of the third heat transfer medium flowing from the flowpassage 36 to the flow passage 37 and the flow rate of the third heattransfer medium flowing from the flow passage 36 to the flow passage 38.Namely, the sixth distribution valve 35 changes the ratio between thethird heat transfer medium flowing from the third flow-through section133 to the heat exchanger 93 and the third heat transfer medium flowingout of the third flow-through section 133 and returning to the thirdflow-through section 133 without flowing through the heat exchanger 93.The sixth distribution valve 35 continuously changes the state of flowbetween a state in which all (100%) of the third heat transfer mediumflows from the third flow-through section 133 to the heat exchanger 93and a state in which all (100%) of the third heat transfer mediumflowing out of the third flow-through section 133 returns to the thirdflow-through section 133 without flowing through the heat exchanger 93.In the sixth distribution valve 35, the pressure loss of the third heattransfer medium is constant irrespective of the ratio at which the thirdheat transfer medium supplied from the third flow-through section 133 isdistributed to the heat exchanger 93.

Since the load of the pump 32 does not change irrespective of thedistribution ratio of the sixth distribution valve 35, the pump 32 isdriven in a constant drive state. As a result, the pump 32 circulatesthe third heat transfer medium through the third circulation circuit230. The third circulation circuit 230 does not include a tank forstoring the third heat transfer medium.

The control section 80 controls the temperature of the lower electrode92 to the target temperature Te. The control section 80 controls thedistribution ratio of the sixth distribution valve 35 on the basis ofthe target temperature Te of the lower electrode 92, and the results ofthe detections performed by the flowmeter 33 and the temperature sensor94. Thus, the flow rate of the third heat transfer medium flowing to thethird flow-through section 133 is adjusted; as a result, the amount ofheat exchanged between the first flow-through section 114 and the thirdflow-through section 133 is adjusted.

The control section 80 controls the set temperature Tc of the firstchiller 11, the heat generation amount of the heater 96, and thedistribution ratio of the sixth distribution valve 35 on the basis ofthe target temperature Te of the lower electrode 92, and the results ofthe detections performed by the temperature sensors 19 and 94. As aresult, the amount of heat supplied from the heat exchanger 93 isadjusted. In order to render the temperature of the lower electrode 92coincident with the target temperature Te, the control section 80 setsthe set temperature Tc of the first chiller 11 to a set temperature Tccorresponding to the target temperature Te, controls the heat generationamount of the heater 96 to a heat generation amount corresponding to thetarget temperature Te, and feedback-controls the distribution ratio ofthe sixth distribution valve 35.

In the same manner as in the first embodiment, the control section 80controls the set temperature Tc of the first chiller 11 and thedistribution ratio of the sixth distribution valve 35. Also, in the samemanner as in the fifth embodiment, the control section 80 may allow andstop the supply of the first heat transfer medium from the first chiller11 or may allow the first chiller 11 to supply the first heat transfermedium at all times.

In the case shown in FIG. 2, at time t3 which precedes time t4 by thepredetermined time Δt2, the control section 80 sets the set temperatureTc such that the set temperature Tc gradually changes to a settemperature Tc (=−25° C.) corresponding to the post-change targettemperature Te3 (=−20° C.). Also, in order to control the temperature ofthe lower electrode 92 to the pre-change target temperature Te2 (=0° C.)until time t4, the control section 80 controls the sixth distributionvalve 35 to decrease the ratio of distribution of the third heattransfer medium to the flow passage 38 and increase the ratio ofdistribution of the third heat transfer medium to the flow passage 37.At that time, the lower electrode 92 is heated by the heater 96.

Notably, during the predetermined time Δt2, the heater 96 may be stopped(heating of the lower electrode 92 may be stopped). In such a case, bythe sixth distribution valve 35, the ratio of distribution of the thirdheat transfer medium to the flow passage 38 is decreased, and the ratioof distribution of the third heat transfer medium to the flow passage 37is increased. Also, the lower electrode 92 may be heated by the heater96 without changing the distribution ratio of the sixth distributionvalve 35. By these operations as well, during the period from time t3 totime t4, the temperature of the lower electrode 92 can be controlled tothe pre-change target temperature Te2 (=0° C.)

At time t5 of FIG. 2, the control section 80 sets the set temperature Tcsuch that the set temperature Tc gradually changes to a set temperature(=50° C.) corresponding to the post-change target temperature Te4 (=90°C.). Also, the control section 80 controls the sixth distribution valve35 to decrease the ratio of distribution of the third heat transfermedium to the flow passage 38 and increase the ratio of distribution ofthe third heat transfer medium to the flow passage 37. At that time, thecontrol section 80 causes the heater 96 to heat the lower electrode 92,thereby raising the temperature of the lower electrode 92 sharply.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the first and fifth embodiments will be described.

The third circulation circuit 230 is independent of the firstcirculation circuit 110, and the third heat transfer medium whose usabletemperature range is wider than that of the first heat transfer mediumcirculates through the third circulation circuit 230. Therefore, thethird heat transfer medium, which may be expensive, is caused tocirculate only through the third circulation circuit 230, whereby theamount of the third heat transfer medium to be used can be reduced.Additionally, the third circulation circuit 230 does not include a tankfor storing the third heat transfer medium. Therefore, the amount of thethird heat transfer medium circulating through the third circulationcircuit 230 can be reduced further.

The first circulation circuit 110 uses the first heat transfer mediumwhose usable temperature range is narrower than that of the third heattransfer medium. Therefore, an inexpensive heat transfer medium can beused as the first heat transfer medium. The heater 96 can heat the lowerelectrode 92 and can control its heat generation amount. Therefore, thelower electrode 92 can be heated directly without use of a heat transfermedium.

The temperature control system 700 includes the sixth distribution valve35 which adjusts the amount of heat exchanged between the firstflow-through section 114 and the third flow-through section 133. Also,the temperature control system 700 includes the control section 80 whichadjusts the heat generation amount of the heater 96. Therefore, theamount of heat supplied from the third flow-through section 133 to theheat exchanger 93 and the amount of heat supplied directly to the lowerelectrode 92 can be adjusted, whereby the temperature of the lowerelectrode 92 can be controlled to the target temperature Te.Accordingly, even in the case where the set temperature Tc is set to aset temperature Tc corresponding to the post-change target temperatureTe at the point in time which precedes the change timing by thepredetermined time, deviation of the temperature of the lower electrode92 from the target temperature Te can be prevented by changing theamount of heat supplied to the heat exchanger 93 by using the sixthdistribution valve 35 and the control section 80.

The control section 80 also adjusts the amount of heat supplied from theheater 96 directly to the lower electrode 92. Therefore, even in thecase where it is difficult to control the temperature of the lowerelectrode 92 to the target temperature Te by merely adjusting the amountof heat supplied from the first flow-through section 114 to the thirdflow-through section 133 and thus to the lower electrode 92 by using thesixth distribution valve 35, it is possible to prevent deviation of thetemperature of the lower electrode 92 from the target temperature Te.

The heater 96 can heat the lower electrode 92 and can control its heatgeneration amount. Therefore, the lower electrode 92 can be heateddirectly without use of a heat transfer medium, whereby theconfiguration can be simplified.

Eighth Embodiment

An eighth embodiment will now be described. In the followingdescription, the difference between the eighth embodiment and the fifthembodiment will be mainly described. Notably, portions identical withthose of the first through seventh embodiments are denoted by the samereference numerals, and their description will not be repeated.

As shown in FIG. 10, a temperature control system 800 of the presentembodiment includes a first circulation circuit 10, a second circulationcircuit 20, a third circulation circuit 30, the control section 80, etc.

The first circulation circuit 10 is a circuit through which theabove-described first heat transfer medium circulates. The secondcirculation circuit 20 is a circuit which is independent of the firstcirculation circuit 10 and through which the above-described second heattransfer medium (i.e., the first heat transfer medium) circulates.

The third circulation circuit 30 is a circuit which is independent ofthe first circulation circuit 10 and the second circulation circuit 20and through which the above-described third heat transfer mediumcirculates.

The first circulation circuit 10 includes the first chiller 11, a firstdistribution valve 12, a flowmeter 13, three (a plurality of) firstflow-through sections 14, etc.

The first chiller 11 (first adjustment apparatus) includes a tank 11 a,a pump 11 b, etc. A flow passage 17 a is connected to the common port(COM) of the first distribution valve 12.

The first distribution valve 12 (adjustment section) is a three-wayvalve having the common port, an A port, and a B port. A flow passage 17b is connected to the A port. A flow passage 17 d is connected to the Bport. The first distribution valve 12 continuously changes the ratiobetween the flow rate of the first heat transfer medium flowing from theflow passage 17 a to the flow passage 17 b and the flow rate of thefirst heat transfer medium flowing from the flow passage 17 a to theflow passage 17 d. The first distribution valve 12 continuously changesthe state of flow between a state in which all (100%) of the first heattransfer medium flows from the flow passage 17 a to the flow passage 17b and a state in which all (100%) of the first heat transfer mediumflows from the flow passage 17 a to the flow passage 17 d. In the firstdistribution valve 12, the pressure loss of the first heat transfermedium is constant irrespective of the ratio at which the first heattransfer medium supplied from the first chiller 11 is distributedbetween the three first flow-through sections 14 and the flow passage 17d.

The flowmeter 13 is provided in the flow passage 17 b. The flowmeter 13measures the flow rate of the first heat transfer medium flowing throughthe flow passage 17 b. The flow passage 17 b is branched into three (aplurality of) flow passages 17 c. The flow passages 17 c are connectedto the respective first flow-through sections 14. The three firstflow-through sections 14 are provided in the heat exchanger 31, and thefirst heat transfer medium flows through the three first flow-throughsections 14.

Flow passages 18 a are connected to the respective first flow-throughsections 14. The three (a plurality of) flow passages 18 a merge into aflow passage 18 b. The flow passage 17 d connects the B port of thefirst distribution valve 12 and the flow passage 18 b to each other.

The second circulation circuit 20 includes a second chiller 21, a seconddistribution valve 22, a flowmeter 23, three (a plurality of) secondflow-through sections 24, etc.

The second chiller 21 (second adjustment apparatus) includes a tank 21a, a pump 21 b, etc. A flow passage 27 a is connected to the common port(COM) of the second distribution valve 22.

The second distribution valve 22 (adjustment section) is a three-wayvalve having the common port, an A port, and a B port. A flow passage 27b is connected to the A port. A flow passage 27 d is connected to the Bport. The second distribution valve 22 continuously changes the ratiobetween the flow rate of the second heat transfer medium flowing fromthe flow passage 27 a to the flow passage 27 b and the flow rate of thesecond heat transfer medium flowing from the flow passage 27 a to theflow passage 27 d. The second distribution valve 22 continuously changesthe state of flow between a state in which all (100%) of the second heattransfer medium flows from the flow passage 27 a to the flow passage 27b and a state in which all (100%) of the second heat transfer mediumflows from the flow passage 27 a to the flow passage 27 d. In the seconddistribution valve 22, the pressure loss of the second heat transfermedium is constant irrespective of the ratio at which the second heattransfer medium supplied from the second chiller 21 is distributedbetween the three second flow-through sections 24 and the flow passage27 d.

The flowmeter 23 is provided in the flow passage 27 b. The flowmeter 23measures the flow rate of the second heat transfer medium flowingthrough the flow passage 27 b. The flow passage 27 b is branched intothree (a plurality of) flow passages 27 c. The flow passages 27 c areconnected to the respective second flow-through sections 24. The threesecond flow-through sections 24 are provided in the heat exchanger 31,and the second heat transfer medium flows through the three secondflow-through sections 24.

Flow passages 28 a are connected to the second flow-through sections 24.The three flow passages 28 a merge into a flow passage 28 b. The flowpassage 27 d connects the B port of the second distribution valve 22 andthe flow passage 28 b to each other.

The third circulation circuit 30 includes five (a plurality of) commonflow-through sections 34, a pump 32, etc.

The five common flow-through sections 34 (third flow-through section,fourth flow-through section) are provided in the heat exchanger 31, andthe third heat transfer medium flows through the common flow-throughsections 34. The common flow-through sections 34 are integrated with thefirst flow-through sections 14 and the second flow-through sections 24.Heat exchange is performed between the common flow-through sections 34and the first flow-through sections 14, and heat exchange is performedbetween the common flow-through sections 34 and the second flow-throughsections 24.

Flow passages 35 a are connected to the respective common flow-throughsections 34. The five (a plurality of) flow passages 35 a merge into aflow passage 35 b.

The heat exchanger 93 (heat exchange section) is connected to theabove-described flow passage 35 b, and the third heat transfer mediumflows through the heat exchanger 93. A flow passage 36 b is connected tothe heat exchanger 93. The pump 32 is provided in the flow passage 36 b.The flow passage 36 b is branched to five (a plurality of) flow passages36 c. The flow passages 36 c are connected to the respective commonflow-through sections 34.

In the flow passage 36 b, the pump 32 sucks the third heat transfermedium from the heat exchanger 93 side and discharges the third heattransfer medium toward the common flow-through sections 34. The pump 32is driven in a constant drive state. As a result, the pump 32 circulatesthe third heat transfer medium through the third circulation circuit 30.The third circulation circuit 30 does not include a tank for storing thethird heat transfer medium.

The control section 80 controls the distribution ratios of the firstdistribution valve 12 and the second distribution valve 22 on the basisof the target temperature Te of the lower electrode 92 and the resultsof the detections performed by the flowmeters 13 and 23 and thetemperature sensor 94. Thus, the flow rate of the first heat transfermedium flowing through the first flow-through sections 14 is adjusted;as a result, the amount of heat exchanged between the first flow-throughsections 14 and the common flow-through sections 34 (third flow-throughsection) is adjusted. Also, the flow rate of the second heat transfermedium flowing through the second flow-through sections 24 is adjusted;as a result, the amount of heat exchanged between the secondflow-through sections 24 and the common flow-through sections 34 (fourthflow-through section) is adjusted.

FIG. 11 is a time chart showing changes in the target temperature Te ofthe lower electrode 92, the output of the first chiller 11, and theoutput of the second chiller 21. As shown in FIG. 11, the targettemperature Te of the lower electrode 92 changes in the same manner asin FIG. 2.

In the same manner as in the fourth embodiment, the control section 80allows and stops the supply of the first heat transfer medium from thefirst chiller 11 and the second chiller 21 in accordance with thechanging target temperature Te. In the same manner as in the fourthembodiment, the control section 80 sets the set temperature Tc of thefirst chiller 11 to a set temperature Tc corresponding to the targettemperature Te. Subsequently, the control section 80 feedback-controlsthe output of the first chiller 11 such that the temperature T1 of thefirst heat transfer medium detected by the temperature sensor 19 becomesequal to the set temperature Tc. Also, the control section 80feedback-controls the distribution ratio of the first distribution valve12 such that the temperature T3 of the lower electrode 92 detected bythe temperature sensor 94 becomes equal to the target temperature Te.The control section 80 also controls the second chiller 21 and thesecond distribution valve 22 in the same manner as in the fourthembodiment.

Further, only during an assist period Tal starting at time t21 (thefirst change timing), the control section 80 sets the set temperature Th(second set temperature) of the second chiller 21 to a set temperatureTh2 (for example, −5° C.) corresponding to the post-change targettemperature Te2 (=0° C.) and operates the second chiller 21 such thatits output decreases gradually from 100%. The control section 80supplies the second heat transfer medium from the second chiller 21 tothe second flow-through sections 24.

At time t22 which precedes, by the predetermined time Δt, time t23 (thefirst change timing) at which the target temperature Te changes to thetarget temperature Te3 (=−20° C.) which is to be reached by supplyingthe first heat transfer medium from the first chiller 11 to the firstflow-through sections 14, the control section 80 sets the settemperature Tc to a set temperature Tc3 (for example, −25° C.)corresponding to the post-change target temperature Te3 (=−20° C.) andoperates the first chiller 11 such that its output become 100%. In sucha case, more time (the predetermined time Δt) may be required to storein the tank 11 a the first heat transfer medium whose temperature hasbeen adjusted beforehand, while controlling the temperature of the lowerelectrode 92 to the target temperature Te2 (=0° C.)

In view of the above, during the period between time t22 (which precedestime t23 by the predetermined time Δt) and time t23, the control section80 sets the set temperature Th to a set temperature Th2 (for example,−25° C.) corresponding to the pre-change target temperature Te2 (=0° C.)and operates the second chiller 21 such that its output become 100%,thereby supplying the second heat transfer medium from the secondchiller 21 to the second flow-through sections 24. At that time, untilthe second heat transfer medium of −25° C. is stored in the tank 21 a ofthe second chiller 21, the second distribution valve 22 is operated suchthat the second heat transfer medium does not flow to the flow passage27 b and flows to the flow passage 27 d, and after the second heattransfer medium of −25° C. has been stored in the tank 21 a of thesecond chiller 21, the second distribution valve 22 is operated suchthat the second heat transfer medium flows to the flow passage 27 b.Notably, in the case where the second heat transfer medium is a liquiddifferent from the first heat transfer medium and may freeze when cooledto −25° C., the set temperature Th2 corresponding to the targettemperature Te2 (=0° C.) may set to −10° C.

The present embodiment having been described in detail above has thefollowing advantages. Notably, only the advantages different from thoseof the first, fourth, and fifth embodiments will be described.

When the first heat transfer medium is supplied from the first chiller11 to the first flow-through sections 14 at time t21 so as to controlthe temperature of the lower electrode 92 to the post-change targettemperature Te2 (=0° C.), the temperature control can be assisted bysupplying the second heat transfer medium from the second chiller 21 tothe second flow-through sections 24. Therefore, the followability of thetemperature of the lower electrode 92 to the target temperature Te2 (=0°C.) can be enhanced further.

When, in the period between times t22 and t23, the set temperature Tc ofthe first chiller 11 is set to the set temperature Tc3 (=−25° C.)corresponding to the post-change target temperature Te3 (=−20° C.) andthe temperature of the lower electrode 92 is controlled to thepre-change target temperature Te2 (=0° C.) by supplying the first heattransfer medium from the first chiller 11 to the first flow-throughsections 14, the temperature control can be assisted by supplying thesecond heat transfer medium from the second chiller 21 to the secondflow-through sections 24. Therefore, it is possible to prevent theabove-described predetermined time Δt from becoming longer.

The above-described embodiments may be modified as follows. Portionsidentical with those of the above-described embodiments are denoted bythe same reference numerals, and their description will not be repeated.

The memory device 80 a (memory section) may be provided outside thecontrol section 80 and be connected to the control section 80.

In the fifth, sixth, and eighth embodiments, the first heat transfermedium and the second heat transfer medium may be different liquids. Forexample, the first heat transfer medium and the second heat transfermedium may differ from each other in the ratio between ethylene glycoland water. Also, the first heat transfer medium and the second heattransfer medium may be formed of different substances. However, thefirst heat transfer medium and the second heat transfer medium may beless expensive than the third heat transfer medium.

The predetermined time Δt during which the heat transfer medium adjustedto a set temperature Tc (Th) corresponding to the post-change targettemperature Te is stored in the tank 11 a (21 a) may be fixed to acertain time. By virtue of such a configuration, the predetermined timeΔt can be set simply.

The control target is not limited to the lower electrode 92 and may bethe upper electrode 91 of the semiconductor manufacturing apparatus 90.Also, the above-described temperature control systems can be applied notonly to the semiconductor manufacturing apparatus 90 but also to othermanufacturing apparatuses, processing apparatuses, etc.

Although the disclosure has been described with respect to only alimited number of embodiments, those skilled in the art, having benefitof this disclosure, will appreciate that various other embodiments maybe devised without departing from the scope of the present invention.Accordingly, the scope of the invention should be limited only by theattached claims.

What is claimed is:
 1. A temperature control system for controlling atemperature of a control target to a target temperature that changeswith lapse of time, the system comprising: a first adjustment apparatusthat: comprises a first tank that stores a first heat transfer medium,adjusts a temperature of the first heat transfer medium to a first settemperature, and supplies the temperature-adjusted first heat transfermedium; a first circulation circuit through which the first heattransfer medium flows from the first adjustment apparatus to a firstflow-through path and returns to the first adjustment apparatus, whereinthe first flow-through path supplies heat to the control target; anadjustment section that adjusts an amount of the heat supplied from thefirst flow-through path to the control target; a memory that stores arelation between the lapse of time and the target temperature; and acontroller that: sets, at a first point in time and based on the storedrelation, the first set temperature to a post-change target temperature,wherein the post-change target temperature is the target temperatureafter a first change timing at which the target temperature changes, andthe first point in time precedes the first change timing by apredetermined time, and causes the adjustment section to adjust theamount of heat and controls the temperature of the control target to apre-change target temperature until the first change timing, wherein thepre-change target temperature is the target temperature before the firstchange timing.
 2. The temperature control system according to claim 1,further comprising: a temperature sensor that detects the temperature ofthe first heat transfer medium supplied from the first adjustmentapparatus, wherein the controller sets the predetermined time based on:the post-change target temperature, the temperature of the first heattransfer medium detected by the temperature sensor, a heat capacity ofheat supplied from the first adjustment apparatus to the control target,and an operating state of the first adjustment apparatus.
 3. Thetemperature control system according to claim 2, wherein the controller:sets the predetermined time for a condition where the first adjustmentapparatus is operated to produce maximum output, and operates the firstadjustment apparatus to produce the maximum output during a period fromthe first point in time to the first change timing.
 4. The temperaturecontrol system according to claim 2, wherein the controller: sets thepredetermined time for a condition where the first adjustment apparatusis operated at maximum efficiency, and operates the first adjustmentapparatus at the maximum efficiency during a period from the first pointin time to the first change timing.
 5. The temperature control systemaccording to claim 1, wherein the adjustment section comprises: a firstdistribution valve that changes a ratio between: the first heat transfermedium flowing from the first adjustment apparatus to the firstflow-through path, and the first heat transfer medium flowing out of thefirst adjustment apparatus and returning to the first adjustmentapparatus without flowing through the first flow-through path.
 6. Thetemperature control system according to claim 1, further comprising: asecond adjustment apparatus that adjusts a temperature of a second heattransfer medium to a second set temperature and supplies thetemperature-adjusted second heat transfer medium; and a secondcirculation circuit through which the second heat transfer medium flowsfrom the second adjustment apparatus to a second flow-through path andreturns to the second adjustment apparatus, wherein the secondflow-through path supplies heat to the control target, wherein theadjustment section adjusts amounts of heat supplied from the firstflow-through path and the second flow-through path to the controltarget, and wherein at the first change timing, the target temperaturechanges to the first target temperature by supplying the first heattransfer medium from the first adjustment apparatus to the first flowthrough path.
 7. The temperature control system according to claim 5,further comprising: a second adjustment apparatus that adjusts atemperature of a second heat transfer medium to a second set temperatureand supplies the temperature-adjusted second heat transfer medium; and asecond circulation circuit through which the second heat transfer mediumflows from the second adjustment apparatus to a second flow-through pathand returns to the second adjustment apparatus, wherein the secondflow-through path supplies heat to the control target, wherein theadjustment section adjusts amounts of heat supplied from the firstflow-through path and the second flow-through path to the controltarget, and wherein at the first change timing, the target temperaturechanges to the first target temperature by supplying the first heattransfer medium from the first adjustment apparatus to the first flowthrough path.
 8. The temperature control system according to claim 6,wherein during an assist period starting at the first change timing, thecontroller: sets the second set temperature to the first post-changetarget temperature, and causes the second adjustment apparatus to supplythe second heat transfer medium to the second flow-through path.
 9. Thetemperature control system according to claim 7, wherein during anassist period starting at the first change timing, the controller: setsthe second set temperature to the first post-change target temperature,and causes the second adjustment apparatus to supply the second heattransfer medium to the second flow-through path.
 10. The temperaturecontrol system according to claim 6, wherein during a period from thefirst point in time to the first change timing, the controller: sets thesecond set temperature to the pre-change target temperature, and causesthe second adjustment apparatus to supply the second heat transfermedium to the second flow-through path.
 11. The temperature controlsystem according to claim 7, wherein during a period from the firstpoint in time to the first change timing, the controller: sets thesecond set temperature to the pre-change target temperature, and causesthe second adjustment apparatus to supply the second heat transfermedium to the second flow-through path.
 12. The temperature controlsystem according to claim 6, wherein a common heat transfer medium isused as both the first heat transfer medium and the second heat transfermedium, wherein a common flow-through path is used as both the firstflow-through path and the second flow-through path, and wherein theadjustment section comprises: a second distribution valve that changes aratio between the common heat transfer medium flowing from the commonflow-through path to the first adjustment apparatus, and the common heattransfer medium flowing from the common flow-through path to the secondadjustment apparatus.
 13. The temperature control system according toclaim 7, wherein a common heat transfer medium is used as both the firstheat transfer medium and the second heat transfer medium, wherein acommon flow-through path is used as both the first flow-through path andthe second flow-through path, and wherein the adjustment section furthercomprises: a second distribution valve that changes a ratio between thecommon heat transfer medium flowing from the common flow-through path tothe first adjustment apparatus, and the common heat transfer mediumflowing from the common flow-through path to the second adjustmentapparatus.
 14. The temperature control system according to claim 6,wherein a common heat transfer medium is used as both the first heattransfer medium and the second heat transfer medium, wherein a commonflow-through path is used as both the first flow-through path and thesecond flow-through path, and wherein the adjustment section comprises:a third distribution valve that changes a ratio among: the common heattransfer medium flowing from the common flow-through path to the firstadjustment apparatus, the common heat transfer medium flowing out of thecommon flow-through path and returning to the common flow-through pathwithout flowing through the first adjustment apparatus and the secondadjustment apparatus, and the common heat transfer medium flowing fromthe common flow-through path to the second adjustment apparatus.
 15. Thetemperature control system according to claim 7, wherein a common heattransfer medium is used as both the first heat transfer medium and thesecond heat transfer medium, wherein a common flow-through path is usedas both the first flow-through path and the second flow-through path,and wherein the adjustment section further comprises: a thirddistribution valve that changes a ratio among: the common heat transfermedium flowing from the common flow-through path to the first adjustmentapparatus, the common heat transfer medium flowing out of the commonflow-through path and returning to the common flow-through path withoutflowing through the first adjustment apparatus and the second adjustmentapparatus, and the common heat transfer medium flowing from the commonflow-through path to the second adjustment apparatus.
 16. Thetemperature control system according to claim 6, wherein the secondcirculation circuit is independent of the first circulation circuit,wherein the temperature control system further comprises: a thirdcirculation circuit that is independent of the first circulation circuitand the second circulation circuit and through which a third heattransfer medium circulates, wherein the third heat transfer medium has ausable temperature range wider than usable temperature ranges of thefirst heat transfer medium and the second heat transfer medium, whereinthe third circulation circuit comprises: a third flow-through paththrough which the third heat transfer medium flows and that exchangesheat with the first flow-through path; and a fourth flow-through paththrough which the third heat transfer medium flows and that exchangesheat with the second flow-through path, wherein the third circulationcircuit does not comprise a tank that stores the third heat transfermedium, wherein the third heat transfer medium flows from the thirdflow-through path and the fourth flow-through path to a heat exchangerand returns to the third flow-through path and the fourth flow-throughpath, wherein the heat exchanger exchanges heat with the control target,and wherein the adjustment section comprises: a fourth distributionvalve that changes a ratio between the third heat transfer mediumflowing from the heat exchanger to the third flow-through path, and thethird heat transfer medium flowing from the heat exchanger to the fourthflow-through path.
 17. The temperature control system according to claim7, wherein the second circulation circuit is independent of the firstcirculation circuit, wherein the temperature control system furthercomprises: a third circulation circuit that is independent of the firstcirculation circuit and the second circulation circuit and through whicha third heat transfer medium circulates, wherein the third heat transfermedium has a usable temperature range wider than usable temperatureranges of the first heat transfer medium and the second heat transfermedium circulates, wherein the third circulation circuit comprises: athird flow-through path through which the third heat transfer mediumflows and that exchanges heat with the first flow-through path; and afourth flow-through path through which the third heat transfer mediumflows and that exchanges heat with the second flow-through path, whereinthe third circulation circuit does not comprise a tank that stores thethird heat transfer medium, wherein the third heat transfer medium flowsfrom the third flow-through path and the fourth flow-through path to aheat exchanger and returns to the third flow-through path and the fourthflow-through path, wherein the heat exchanger exchanges heat with thecontrol target, and wherein the adjustment section further comprises: afourth distribution valve that changes a ratio between the third heattransfer medium flowing from the heat exchanger to the thirdflow-through path, and the third heat transfer medium flowing from theheat exchanger to the fourth flow-through path.
 18. The temperaturecontrol system according to claim 6, wherein the second circulationcircuit is independent of the first circulation circuit, wherein thetemperature control system further comprises: a third circulationcircuit that is independent of the first circulation circuit and thesecond circulation circuit and through which a third heat transfermedium circulates, wherein the third heat transfer medium has a usabletemperature range wider than usable temperature ranges of the first heattransfer medium and the second heat transfer medium, wherein the thirdcirculation circuit comprises: a third flow-through path through whichthe third heat transfer medium flows and that exchanges heat with thefirst flow-through path; and a fourth flow-through path through whichthe third heat transfer medium flows and that exchanges heat with thesecond flow-through path, wherein the third circulation circuit does notcomprise a tank that stores the third heat transfer medium, wherein thethird heat transfer medium flows from the third flow-through path andthe fourth flow-through path to a heat exchanger and returns to thethird flow-through path and the fourth flow-through path, wherein theheat exchanger exchanges heat with the control target, and wherein theadjustment section comprises: a fifth distribution valve that changes aratio among: the third heat transfer medium flowing from the heatexchanger to the third flow-through path, the third heat transfer mediumflowing out of the heat exchanger and returning to the heat exchangerwithout flowing through the third flow-through path and the fourthflow-through path, and the third heat transfer medium flowing from theheat exchanger to the fourth flow-through path.
 19. The temperaturecontrol system according to claim 7, wherein the second circulationcircuit is independent of the first circulation circuit, wherein thetemperature control system further comprises: a third circulationcircuit that is independent of the first circulation circuit and thesecond circulation circuit and through which a third heat transfermedium circulates, wherein the third heat transfer medium has a usabletemperature range wider than usable temperature ranges of the first heattransfer medium and the second heat transfer medium, wherein the thirdcirculation circuit comprises: a third flow-through path through whichthe third heat transfer medium flows and that exchanges heat with thefirst flow-through path; and a fourth flow-through path through whichthe third heat transfer medium flows and that exchanges heat with thesecond flow-through path, wherein the third circulation circuit does notcomprise a tank that stores the third heat transfer medium, wherein thethird heat transfer medium flows from the third flow-through path andthe fourth flow-through path to a heat exchanger and returns to thethird flow-through path and the fourth flow-through path, wherein theheat exchanger exchanges heat with the control target, and wherein theadjustment section further comprises: a fifth distribution valve thatchanges a ratio among: the third heat transfer medium flowing from theheat exchanger to the third flow-through path, the third heat transfermedium flowing out of the heat exchanger and returning to the heatexchanger without flowing through the third flow-through path and thefourth flow-through path, and and the third heat transfer medium flowingfrom the heat exchanger to the fourth flow-through path.
 20. Atemperature control system for controlling a temperature of a controltarget to a target temperature that changes with lapse of time, thesystem comprising: a first adjustment apparatus that: comprises a firsttank that stores a first heat transfer medium, adjusts a temperature ofthe first heat transfer medium to a first set temperature, and suppliesthe temperature-adjusted first heat transfer medium; a first circulationcircuit through which the first heat transfer medium flows from thefirst adjustment apparatus to a first flow-through path and returns tothe first adjustment apparatus; a heater that heats the control targetand controls a heat generation amount; a third circulation circuit that:is independent of the first circulation circuit, wherein a third heattransfer medium circulates through the third circulation circuit, andthe third heat transfer medium has a usable temperature range wider thana usable temperature range of the first heat transfer medium, comprisesa third flow-through path that exchanges heat with the firstflow-through path, and does not comprise a tank that stores the thirdheat transfer medium; an adjustment section that adjusts an amount ofheat exchanged between the first flow-through path and the thirdflow-through path, and adjusts the heat generation amount of the heater;a memory that stores a relation between the lapse of time and the targettemperature; and a controller that: sets, at a first point in time andbased on the stored relation, the first set temperature to a post-changetarget temperature, wherein the post-change target temperature is thetarget temperature after a first change timing at which the targettemperature changes, and the first point in time precedes the firstchange timing by a predetermined time to a first target temperature bysupplying the first heat transfer medium from the first adjustmentapparatus to the first flow-through path, and causes the adjustmentsection to adjust the amount of heat and the heat generation amount, andcontrols the temperature of the control target to a pre-change targettemperature until the first change timing, wherein the pre-change targettemperature is the target temperature before the first change timing.